GEMGrid: a wafer post-processed GEM-like radiation detector

Carballo, V.M. Blanco; Bilevych, Y.; Chefdeville, M.; Fransen, M.; Graaf, H. van der; Salm, Cora; Schmitz, Jurriaan; Timmermans, J.

doi:10.1016/j.nima.2009.06.023

Cited by 9 publications

(8 citation statements)

References 20 publications

(16 reference statements)

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“…Originally developed for direct radiation detection, solid-state pixel circuits have been adapted to collect and record the charge released by ionization in the gas and amplified by a GEM-or Micromegas-like structure, integrated over the silicon sensor. Due to the large gas gain and the very low electrode capacitance, these devices have the potential to detect and image single ionization electrons, reaching the ultimate tracking precision of a gaseous counter [100,150].…”

Section: Discussionmentioning

confidence: 99%

“…Fig. 51 is an example of a double track event recorded with the so-called GEMGrid, a hybrid detector realized by post-processing the Timepix silicon chip [99] with $ 64,000, 55 Â 55 mm pixels to fabricate a GEM-like structure over a solid state pixel sensor; each dot represent the reconstructed 3-D position of a cluster in the ionization trails [100].…”

Section: Gem Readout Of Time Projection Chambersmentioning

confidence: 99%

See 1 more Smart Citation

The gas electron multiplier (GEM): Operating principles and applications

Sauli

2016

Nuclear Instruments and Methods in Physics Research Section A:

333

197

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a b s t r a c tIntroduced by the author in 1997, The Gas Electron Multiplier (GEM) constitutes a powerful addition to the family of fast radiation detectors; originally developed for particle physics experiments, the device and has spawned a large number of developments and applications; a web search yields more than 400 articles on the subject. This note is an attempt to summarize the status of the design, developments and applications of the new detector.

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Section: Discussionmentioning

confidence: 99%

Section: Gem Readout Of Time Projection Chambersmentioning

confidence: 99%

The gas electron multiplier (GEM): Operating principles and applications

Sauli

2016

Nuclear Instruments and Methods in Physics Research Section A:

333

197

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“…Table 2 presents the measured values. Although some challenges were faced during processing, as reported in this work, the microelectronic techniques employed are widely used and guarantees good dimensional accuracy, combined with the high purity of the materials, an advantage about the aging of the detector [10].…”

Section: Resultsmentioning

confidence: 99%

“…Another highlight about Micromegas is the use of SU-8, a highly adherent resist, which can be used as a permanent material, incorporated as an insulator. InGrid and GEMGrid-like devices also 2021 JINST 16 P08022 refer to this material as an insulating spacer [10,11]. At the same time, other materials such as Silicon oxide can be employed [12].…”

Section: Introductionmentioning

confidence: 99%

SU-8 processing improvement and simulating studies for a Micromegas detector fabrication

Sampaio¹,

Marinho²,

Cabruja³

et al. 2021

J. Inst.

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This paper reports the manufacturing methodology to produce an electron multiplier, a Micromegas device, integrated onto a micro-pixel readout anode using a Silicon wafer as a holder. It describes the improvement in the processing of the insulating grid material SU-8 and electrical tests with the device. For the latter purpose, simulations with Garfield++ are carried out to predict the detector response for different gas mixtures. The Micromegas detector sandwich proposed in this work presents a series of problems, which we have addressed and discussed within this paper. The temperature control throughout the processing of SU-8 is extremely important, to be able to develop it. When developing the final SU-8 layer, we have used an extra photoresist, which combined with the SU-8, resulted in a much-improved shape of the Micromegas SU-8 hole-grid. Electrical testes are performed in order to verify the signals produced by a 55Fe radioactive source. A gas gain about 1,3 × 102, using Ar/C2H6 (75/25) mixture, is achieved for the prototype manufactured.

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“…Microwells made by sandwiching several layers of SU-8 and electrodes can be envisioned to increase the multiplication gain. The CMOS compatibility of this process was demonstrated by Blanco Carballo et al [9] by fabricating this microwell structure (called by them GEMGrid because of its analogies with Gas Electron Multipliers) directly over an unpackaged Timepix CMOS pixel detector that was used as pixelised anode and readout electronics (Figure 2b). …”

Section: Microstrip and Microwell Mpgdsmentioning

confidence: 99%

SU-8 as a Material for Microfabricated Particle Physics Detectors

Maoddi

Mapelli

Jiguet³

et al. 2014

Micromachines

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Several recent detector technologies developed for particle physics applications are based on microfabricated structures. Detectors built with this approach generally exhibit the overall best performance in terms of spatial and time resolution. Many properties of the SU-8 photoepoxy make it suitable for the manufacturing of microstructured particle detectors. This article aims to review some emerging detector technologies making use of SU-8 microstructuring, namely micropattern gaseous detectors and microfluidic scintillation detectors. The general working principle and main process steps for the fabrication of each device are reported, with a focus on the advantages brought to the device functionality by the use of SU-8. A novel process based on multiple bonding steps for the fabrication of thin multilayer microfluidic scintillation detectors developed by the authors is presented. Finally, a brief overview of the applications for the discussed devices is given.

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GEMGrid: a wafer post-processed GEM-like radiation detector

Cited by 9 publications

References 20 publications

The gas electron multiplier (GEM): Operating principles and applications

The gas electron multiplier (GEM): Operating principles and applications

SU-8 processing improvement and simulating studies for a Micromegas detector fabrication

SU-8 as a Material for Microfabricated Particle Physics Detectors

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