Gas phase and surface kinetics in plasma and hot filament-enhanced catalytic chemical vapor deposition of carbon nanostructures

Abstract

International audienceSimulations of the gas phase chemistry (C2H2/H2) coupled with surface reactions for the catalytic growth of carbon nanostructures (nanotubes/nanofibers), using different activation modes of catalytic chemical vapor deposition (CCVD) process, are presented. Deposits issued from thermal CCVD, hot-filament CCVD, plasma- enhanced CCVD and plasma-enhanced combined with hot-filament CCVD are compared to simulations of the gas phase and surface kinetics. The influence of the activation elements is described in detail. According to these simulations taking into account optical emission spectroscopy data, gas phase composition and linear growth rate of tubular nanostructures are predicted in good agreement with the experimental observations

Insights into carbon nanotube growth using an automated gravimetric apparatus

“…The chemical system containing 227 species and 827 reactions that was developed and experimentally validated by Norinaga et al [24,25] for light hydrocarbon pyrolysis under CVD conditions was used rather than the plasma-or oxidation-derived mechanisms currently used in the CNT literature [23,[26][27][28][29][30][31][32][33][34]. Surface reactions were not considered because they are primarily a function of catalyst rather than apparatus.…”

Experience in depositing carbon coatings by the gas-jet method

“…Nevertheless, the search for new methods of obtaining diamond and diamond-like coatings remains topical [7][8][9].…”