Experience in depositing carbon coatings by the gas-jet method

Володин, В. А.; Emel’yanov, A. A.; Ребров, А. К.; Тимошенко, Н. И.; Yudin, I. B.

doi:10.1007/s10891-012-0626-9

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The Diamond Synthesis From the Thermally Activated Flow1

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Cited by 4 publications

(1 citation statement)

References 14 publications

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“…The experimental studies [39][40][41] were accompanied by numerical investigation of flows past wire obstacles, particularly with gas dissociation [41][42][43].…”

Section: The Diamond Synthesis From the Thermally Activated Flowmentioning

confidence: 99%

Nanostructure synthesis from high velocity gas mixture flows

Ребров¹

2014

AIP Conference Proceedings

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“…The experimental studies [39][40][41] were accompanied by numerical investigation of flows past wire obstacles, particularly with gas dissociation [41][42][43].…”

Section: The Diamond Synthesis From the Thermally Activated Flowmentioning

confidence: 99%

Nanostructure synthesis from high velocity gas mixture flows

Ребров¹

2014

AIP Conference Proceedings

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The gas‐dynamic synthesis of diamond by thermal activation

Emel’yanov

Ребров

Yudin

2014

Physica Status Solidi (a)

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The study presents results on deposition of diamond structures from high‐velocity flows of carbon‐containing a gas mixture activated by hot surfaces. Important problems were solved by creation of the reactor using a spiral of heat‐resistant material, inserted into the chamber with an inlet nozzle. The possibilities of diamond synthesis in wide parameters ranges (pressure from 10−4 to 100 Torr, flow rates from 500 to 3000 sccm, substrate temperature from 1100 to 1600 K) have been studied experimentally. For analysis of the hydrogen flow, the direct simulation Monte Carlo (DSMC) method was used. The activation–deactivation influence of reactor surfaces has been taken into account. The results of diamond crystal synthesis are presented for the cases of joint and separated H2 and CH4 gas delivery. Due to retaining the catalytic tungsten properties in the case of separated gas delivery, an increasing growth rate of diamond crystals was discovered.

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The reactor–activator for gas-jet deposition of diamond structures

Ребров

Andreev

B'yadovskiy

et al. 2016

Review of Scientific Instruments

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This paper presents a new method of deposition of diamond and diamond like structures by using the original reactor for activation of carbonaceous gas mixtures. One of the important characteristics of the described reactor is the power efficiency owing to low heat losses. The new method of gas flow formation opens new possibilities to get important trade-offs (wide range of background conditions and others). The principal possibility of diamond deposition is proved by experiments with the flow of hydrogen and methane mixture in tungsten resistively heating cylindrical channels. Electron microphotographs and Raman spectrum of deposited structures prove the fact that deposited samples are diamond structures. Numerical study of the mixture flow through the reactor was carried for optimization of gas flow conducted to a substrate.

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Experience in depositing carbon coatings by the gas-jet method

Cited by 4 publications

References 14 publications

Nanostructure synthesis from high velocity gas mixture flows

Nanostructure synthesis from high velocity gas mixture flows

The gas‐dynamic synthesis of diamond by thermal activation

The reactor–activator for gas-jet deposition of diamond structures

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