“…6,7) Recently, nanoimprint lithography is projected to be used in life science fields such as biosensors, 8,9) cell culture scaffolds, 10,11) and microneedles. 12,13) Compared with lithography techniques that require large and expensive equipment with facilities, such as photolithography, 14,15) extreme ultraviolet lithography, 16,17) electron beam lithography, 18,19) and ion beam methods, 20,21) the nanoimprint lithography of simple molding processes is a low-cost and high-productivity technology that can be applied to various transferred function materials, large areas, and pattern transfer with high aspect ratio and resolution. [22][23][24][25] However, the high viscosity of the imprint materials makes fabrication difficult because gas microbubbles are easily trapped in the gas-impermeable molds.…”