2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) 2022
DOI: 10.1109/mems51670.2022.9699670
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GaN-on-SiC Surface Acoustic Wave Devices Up to 14.3 GHz

Imtiaz Ahmed
1
,
Udit Rawat
2
,
Jr-Tai Chen
3
et al.
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Cited by 5 publications
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References 13 publications
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Geometry characteristics and wide temperature behavior of silicon-based GaN surface acoustic wave resonators with ultrahigh quality factor

Yu,
Liang,
Zhao
et al. 2023
Sci. China Inf. Sci.
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Geometry characteristics and wide temperature behavior of silicon-based GaN surface acoustic wave resonators with ultrahigh quality factor

Yu,
Liang,
Zhao
et al. 2023
Sci. China Inf. Sci.
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0
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Sezawa Guided Mode on Periodic Grooves of GaN/Sapphire Substrate

Jaafar
1
,
Wee
2
,
Dee
3
et al. 2022
Electron. Mater. Lett.
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Lithium Niobate Thin Film Based A1 Mode Resonators with Frequency up to 16 Ghz and Electromechanical Coupling Factor Near 35%

Su
1
,
Yu
2
,
Fu
3
et al. 2023
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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