“…GaN on silicon (Si) substrate is becoming an attractive cost-effective solution to rapidly integrate GaN HEMTs in the well-established Si fabrication processes. 3 The GaN on Si HEMT has extra parasitic leakage currents that may be related to the conduction through the substrate, which has lower resistivity than silicon carbide (SiC) based substrate. [4][5][6][7][8][9] To simulate these effects, Chumbes et al, 4 , and later Manohar et al, 5 and Cabral et al, 6 used extrinsic series RC branches representing the metal/buffer/substrate layers that act as non-ideal (resistive) n-i-p diodes under RF operation.…”