2015
DOI: 10.1021/am507287f
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GaN as an Interfacial Passivation Layer: Tuning Band Offset and Removing Fermi Level Pinning for III–V MOS Devices

Abstract: The use of an interfacial passivation layer is one important strategy for achieving a high quality interface between high-k and III-V materials integrated into high-mobility metal-oxide-semiconductor field-effect transistor (MOSFET) devices. Here, we propose gallium nitride (GaN) as the interfacial layer between III-V materials and hafnium oxide (HfO2). Utilizing first-principles calculations, we explore the structural and electronic properties of the GaN/HfO2 interface with respect to the interfacial oxygen c… Show more

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Cited by 48 publications
(31 citation statements)
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“…Suitable band edge discontinuities (i.e., band offsets) is a crucial requirement for the efficient operation of field-effect transistors [12,25]. The PDOS scheme can be used to roughly determine the band edge line-up in the interface supercell model [30,34]. Using this method, the energy difference between their valence band maxima (i.e., VBO) is roughly observed to be 1.3 eV, 1.4 eV, 0.7 eV and 0.4 eV for HfO 2 /VO 2 , ZrO 2 /VO 2 , Al 2 O 3 /VO 2 and TiO 2 /VO 2 interfaces in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Suitable band edge discontinuities (i.e., band offsets) is a crucial requirement for the efficient operation of field-effect transistors [12,25]. The PDOS scheme can be used to roughly determine the band edge line-up in the interface supercell model [30,34]. Using this method, the energy difference between their valence band maxima (i.e., VBO) is roughly observed to be 1.3 eV, 1.4 eV, 0.7 eV and 0.4 eV for HfO 2 /VO 2 , ZrO 2 /VO 2 , Al 2 O 3 /VO 2 and TiO 2 /VO 2 interfaces in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Negative E b means a stable heterostructure. The vacancy defect formation energy, which is important for predicting the concentration of certain defect, is defined as [34,35]:…”
Section: Computational Detailsmentioning
confidence: 99%
“…To correct the van der Waals interaction between the AlN and graphene sublayers, the DFT-D3 approach proposed by Grimme [ 38 ] was employed. A 20 vacuum thickness was constructed to cancel the interactions from the periodic images along the z-direction [ 39 , 40 ]. The -centered Monkhorst–Pack [ 41 ] approach was used to sample the reciprocal space, and the grid density was set as 4 × 4 × 1.…”
Section: Computation Methodsmentioning
confidence: 99%