Gamma Irradiation Effects on Surface-Micromachined Polysilicon Resonators

Wang, Lei; Tang, Jieying; Huang, Qing‐An

doi:10.1109/jmems.2011.2162495

Cited by 13 publications

(11 citation statements)

References 9 publications

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“…Changes in the resonant frequencies of surface micromachined poly-Si resonators were also reported in Ref. 30 after exposure to gamma (γ) radiation. In this case the observed decrease in the measured resonant frequencies is attributed to injection annealing effects which cause re-ordering of defects in poly-Si and result in the formation of more stable configurations with lower levels of built-in residual stress.…”

Section: Introductionsupporting

confidence: 55%

Impact of radiations on the electromechanical properties of materials and on the piezoresistive and capacitive transduction mechanisms used in microsystems

et al. 2013

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The impact of different types of radiation on the electromechanical properties of materials used in microfabrication and on the capacitive and piezoresistive transduction mechanisms of MEMS is investigated. MEMS technologies could revolutionize avionics, satellite and space applications provided that the stress conditions which can compromise the reliability of microsystems in these environments are well understood. Initial tests with MEMS revealed a vulnerability of some types of devices to radiation induced dielectric charging, a physical mechanism which also affects microelectronics, however integration of novel functional materials in microfabrication and the current trend to substitute SiO 2 with high-k dielectrics in ICs pose new questions regarding reliability in radiation environments. The performance of MEMS devices with moving parts could also degrade due to radiation induced changes in the mechanical properties of the materials. It is thus necessary to investigate the effects of radiation on the properties of thin films used in microfabrication and here we report on tests with γ, high energy protons and fast neutrons radiation. Prototype SOI based MEMS magnetometers which were developed in UCL are also used as test vehicles to investigate radiation effects on the reliability of magnetically actuated and capacitively coupled MEMS.

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Section: Introductionsupporting

confidence: 55%

Impact of radiations on the electromechanical properties of materials and on the piezoresistive and capacitive transduction mechanisms used in microsystems

et al. 2013

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“…Surface-micromachined polysilicon resonator beams irradiated by gamma-and electron radiation have been investigated in [65], [66]. A decrease of the resonance frequency and an increase of resistance were observed.…”

Section: Siliconmentioning

confidence: 99%

Mechanical properties of MEMS materials: reliability investigations by mechanical- and HRXRD-characterization related to environmental testing

2014

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The performance and aging of MEMS often rely on the stability of the mechanical properties over time and under harsh conditions. An overview is given on methods to investigate small variations of the mechanical properties of structural MEMS materials by functional characterization, high-resolution x-ray diffraction methods (HR-XRD) and environmental testing. The measurement of the dynamical properties of micro-resonators is a powerful method for the investigation of elasticity variations in structures relevant to microtechnology. X-ray diffraction techniques are used to analyze residual strains and deformations with high accuracy and in a non-destructive manner at surfaces and in buried micro-structures. The influence of elevated temperatures and radiation damage on the performance of resonant microstructures with a focus on quartz and single crystal silicon is discussed and illustrated with examples including work done in our laboratories at CSEM and EPFL.

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“…This observation was explained by the introduction of defects which were mobile at room temperature and therefore annealed out after the irradiation. Surface-micromachined polysilicon resonator beams irradiated by gamma-and electron radiation have been investigated in [5], [6]. A decrease of the resonance frequency and an increase of resistance were observed.…”

Section: Icro-electromechanical Systems (Mems)mentioning

confidence: 99%

Proton-Radiation Tolerance of Silicon and SU-8 as Structural Materials for High-Reliability MEMS

Bandi

Polido-Gomes

Neels

et al. 2013

J. Microelectromech. Syst.

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Abstract-The susceptibility of single-crystal silicon and SU-8 resonators to proton-radiation induced degradation was investigated. Both materials are in widespread use for microsystems structures, thus the stability of the mechanical properties must be ensured over the full device lifecycle. Effects of spacerelevant proton doses were examined by monitoring minute changes in the Young's modulus and by structural investigations using high-resolution X-ray diffraction (HRXRD). Single crystal silicon resonators were exposed to 10 MeV and 60 MeV protons with doses up to 10 13 cm −2 . Even at the highest doses neither a change of the Young's modulus was observed nor did Xray diffraction indicate the formation of elevated concentrations of structural defects. The compatibility of SU-8 with inorbit radiation environments was investigated at fluences of 10 10 -10 12 cm −2 using protons with energies ranging from 10 MeV to 200 MeV. Its elastic modulus changed by less than 5.5% at the highest doses.[2013-0009]

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Gamma Irradiation Effects on Surface-Micromachined Polysilicon Resonators

Cited by 13 publications

References 9 publications

Impact of radiations on the electromechanical properties of materials and on the piezoresistive and capacitive transduction mechanisms used in microsystems

Impact of radiations on the electromechanical properties of materials and on the piezoresistive and capacitive transduction mechanisms used in microsystems

Mechanical properties of MEMS materials: reliability investigations by mechanical- and HRXRD-characterization related to environmental testing

Proton-Radiation Tolerance of Silicon and SU-8 as Structural Materials for High-Reliability MEMS

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