“…The short ion diffusion length facilitates the diffusion and the corresponding insertion and extraction of the ions. The active materials fabricated by ALD mainly include metal oxides (e.g., SnO 2 , ZnO, TiO 2 , V 2 O 5 , Co 3 O 4 , Fe 2 O 3 , NiO, MnO x , RuO 2 ), [179][180][181][182][183][184][185][186][187] sulphides (e.g., GaS x ), [188,189] and others (e.g., LiCoO 2 , LiMn 2 O 4 , Li 4 Ti 5 O 12 , FePO 4 , LiFePO 4 ). [178] The short path lengths for ion diffusion permit the application of low Li + conductive materials, high rate performance and high energy densities.…”