2003
DOI: 10.1016/s0022-0248(02)02515-0
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(Ga,Mn,N) compounds growth with mass-analyzed low energy dual ion beam deposition

Abstract: The (Ga,Mn,N) samples were grown by the implantation of low-energy Mn ions into GaN/Al 2 O 3 substrate at different elevated substrate temperatures with mass-analyzed low-energy dual ion beam deposition system. Auger electron spectroscopy depth profile of samples grown at different substrate temperatures indicates that the Mn ions reach deeper in samples with higher substrate temperatures. Clear X-ray diffraction peak from (Ga,Mn)N is observed in samples grown at the higher substrate temperature. It indicates … Show more

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Cited by 3 publications
(5 citation statements)
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References 15 publications
(18 reference statements)
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“…1). Additionally, a detailed examination of the patterns for the 10 In this regard, there seems to be no a priori structural basis to expect the formation of stable solid solutions of manganese nitride phase(s) in the h-GaN structure or vice versa. The known polytypes of manganese nitride encompass u (MnN), h (Mn 3 N 2 ), z (Mn 5 N 2 , Mn 2 N, and MnN 0.86 ), and 1(Mn 4 N) phases [14].…”
Section: Aqueous Solutionsmentioning
confidence: 99%
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“…1). Additionally, a detailed examination of the patterns for the 10 In this regard, there seems to be no a priori structural basis to expect the formation of stable solid solutions of manganese nitride phase(s) in the h-GaN structure or vice versa. The known polytypes of manganese nitride encompass u (MnN), h (Mn 3 N 2 ), z (Mn 5 N 2 , Mn 2 N, and MnN 0.86 ), and 1(Mn 4 N) phases [14].…”
Section: Aqueous Solutionsmentioning
confidence: 99%
“…The coexistence of ferromagnetism and semiconducting properties in one material (magnetic semiconductors) offers an attractive area for combining the advantages of both in spintronics [2,9,10]. In this regard, the GaN/Mn system has recently become the subject of extensive research especially after it was predicted that GaN-based diluted magnetic semiconductors might have Curie temperatures exceeding room temperature [10,11].…”
Section: Introductionmentioning
confidence: 99%
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“…The resulted peak shifts are lower than that of GaN:Mn film grown using ion implantation method, i.e. 0.357 o for 1.5 % of Mn concentration [5]. As the growth temperature is changed to 700 o C, the single phase of GaN:Mn can be observed for GaN:Mn films with Mn concentration up to 3.2 %.…”
Section: Methodsmentioning
confidence: 78%
“…Therefore, the peak of the as-annealed sample is much weaker that of the as-grown sample. Finally, the peak of the as-annealed sample shows a little shift (0.13 • ) to the lower angle, indicating the lattice expansion of sample caused by both the substitutional and interstitial Mn atoms [7]. Fig.…”
Section: Methodsmentioning
confidence: 86%