Fundamental study of an electrostatic chuck for silicon wafer handling

Asano, K.; Hatakeyama, F.; Yatsuzuka, K.

doi:10.1109/ias.1997.626335

Cited by 20 publications

(25 citation statements)

References 2 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Electroadhesion has been used in industry for several years in applications such as grippers [6], [7], clothing manufacturing [8], electrostatic chucks [9], [10], and in the last several years as an attachment method for climbing robots [5] and modular robots [11], [12]. Also, patents are held on the technology [15], [16], [17] and its application in several areas, including medical devices [18], climbing robots [19], grippers [20], or extension ladder stability devices [21].…”

Section: Introductionmentioning

confidence: 99%

Stretchable electroadhesion for soft robots

Germann

Schubert

Floreano

2014

2014 IEEE/RSJ International Conference on Intelligent Robots and Systems

View full text Add to dashboard Cite

Abstract-With the ongoing rise of soft robots there emerges a need for new technologies that can cope with hyper-flexibility and stretchability. In this paper, we describe a new method for enabling controllable adhesion, namely electroadhesion, for use in soft robots. We present a method to manufacture stretchable electroadhesive pads and characterize their performance when stretching the pad more than double its original length. Our results suggest that the normal detachment force per area slightly decreases with the stretching, while the shear detachment force per area increases with the stretch ratio. These results imply that stretchable electroadhesive pads have higher adaptivity than non-stretchable pads because their mechanical stiffness and adhesive forces can be controlled through stretching.

show abstract

Section: Introductionmentioning

confidence: 99%

Stretchable electroadhesion for soft robots

Germann

Schubert

Floreano

2014

2014 IEEE/RSJ International Conference on Intelligent Robots and Systems

View full text Add to dashboard Cite

show abstract

“…Electrostatic adhesion technology was first widely used in areas of industry, such as the semiconductor industry, exposure systems, CVDs and dry etchers [6][7][8]. In electrostatic devices that are called electrostatic chucks or electrostatic grippers, it was proven that electrostatic adhesion is effective not only for conductive materials, but also for non-conductive ones, such as glass panels, fibre cloth etc.…”

Section: Introductionmentioning

confidence: 99%

Wall Climbing Robot Using Electrostatic Adhesion Force Generated by Flexible Interdigital Electrodes

Liu

Chen

Shen

et al. 2013

International Journal of Advanced Robotic Systems

View full text Add to dashboard Cite

Electrostatic adhesion technology has broad application prospects on wall climbing robots because of its unique characteristics compared with other types of adhesion technologies. A double tracked wall climbing robot based on electrostatic adhesion technology is presented including electrode panel design, mechanical structure design, power supply system design and control system design. A theoretical adhesion model was established and the electrostatic potential and field were expressed by series expansions in terms of solutions of the Laplace function. Based on this model, the electrostatic adhesion force was calculated using the Maxwell stress tensor formulation. Several important factors which may influence the electrostatic adhesion force were analysed and discussed by both FEM simulation and theoretical calculation. In addition, experiments on the adhesion performance of the electrode panel and the climbing performance of the robot on various wall materials were carried out. Both the simulation and experiment results verify the feasibility of electrostatic adhesion technology being applied on wall climbing robots. The theoretical model and calculation method for the electrostatic adhesion force proposed in this paper are also justified.

show abstract

“…The versatility of the electroadhesive force led to the development of wall-climbing robots [9][10][11], and perching mechanism of a robotic insect [12] in the field of robotics. For manipulation tasks, it is also applied to manipulation of arbitrary objects [13], fabrics [14], carbon fibers [15], unbound sheets of papers [16], and silicon wafers [17]. Thus far, the maximum force that electroadhesion can generate has mainly been studied [18].…”

Section: B Electroadhesive Forcementioning

confidence: 99%

Automatic page-turning mechanism with near-field electroadhesive force for linearly correctable imaging

Lee

Jeon

Cha

et al. 2017

2017 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS)

View full text Add to dashboard Cite

Abstract-Recently, demand for digitization of books has increased in tandem with the spread of portable devices for electronic books. However, in a number of invented bookscanning devices, pages are turned manually by users, or pricey three-dimensional cameras are needed for image correction. Our automatic page-turning mechanism employs near-field electroadhesive force to turn a single page. As the near-field electroadhesive force on the closest sheet of paper is far stronger than that on the second, only a single sheet of paper can be lifted. Using Fourier series expansion, we prove that regardless of the geometrical configuration of electrodes, the force ratio on the closest to the second is dominantly controlled by the period of the configuration. Based on this, a novel electrode configuration is designed aiming to give higher force ratio than the conventional interdigital patterns. The advantage of our mechanism in image processing is that perspective correction is compatible with our mechanism, hence not requiring devices for acquiring 3-D information to reconstruct images. Our automatic page-turning mechanism with a fair success rate and the reduced number of components shows that it is a promising method for automatic low-cost book-scanning devices.

show abstract

Fundamental study of an electrostatic chuck for silicon wafer handling

Cited by 20 publications

References 2 publications

Stretchable electroadhesion for soft robots

Stretchable electroadhesion for soft robots

Wall Climbing Robot Using Electrostatic Adhesion Force Generated by Flexible Interdigital Electrodes

Automatic page-turning mechanism with near-field electroadhesive force for linearly correctable imaging

Contact Info

Product

Resources

About