2005
DOI: 10.1177/0278364905055594
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Fundamental Principles and Issues of High-speed Piezoactuated Three-legged Motion for Miniature Robots Designed for Nanometer-scale Operations

Abstract: One of the important aspects in the development of high-throughput platforms based on a fleet of scientific instruments in the form of miniature wireless robots designed for fast operations at the nanometer-scale, is the conception of an embedded locomotion system capable of fast displacements between two successive locations while being accurate enough to position the robot within the range of the embedded instrument, typically within a few tenths of nanometers. This paper describes not only the fundamental p… Show more

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Cited by 25 publications
(11 citation statements)
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“…A three-legged miniature robot [1], ambulatory robot HAMR [2], and myriapod robot [3] with legged locomotion were developed using piezo actuators. A piezo actuator is one of popular micro actuators.…”
Section: Introductionmentioning
confidence: 99%
“…A three-legged miniature robot [1], ambulatory robot HAMR [2], and myriapod robot [3] with legged locomotion were developed using piezo actuators. A piezo actuator is one of popular micro actuators.…”
Section: Introductionmentioning
confidence: 99%
“…Microrobots have been demonstrated based on actuators such as piezoelectric vibrating legs [1], scratchdrive actuators [2] with independent steering arms, thermally actuated silicon legs [3], and artificial flagella made of carbon nanotubes [4], among others. Techniques have also been developed to externally manipulate single cells in parallel using dielectrophoresis [5].…”
Section: Introductionmentioning
confidence: 99%
“…They have been used in various research fields, such as artificial intelligence, military and entertainment. In recent years, much attention has concentrated on the research of micromanipulation microrobots, such as MINIMAN [5], MiCRon [6], NanoWalker [7], and RollBot [8]. These microrobots all employed piezoceramic actuators and the stick-slip locomotion technique [9] to achieve high micromanipulation positioning precision, which is a very important parameter for them.…”
Section: Introductionmentioning
confidence: 99%