Functionality, Yield and Reliability Analysis of SiGe Micro-mirrors using Automated Optical Measurement Techniques

Abstract

This paper discusses optical systems for automatic, wafer or chip level measurements of metrology, functional yield and reliability of MEMS. The functionality of the systems is demonstrated on megapixel arrays of SiGe micro-mirrors. The back-bone of the systems is formed by existing commercial systems, but home-developed procedures and software were written to extend their functionality and applicability.