Fully Integrated Electronic–Photonic Biosensor for Label-Free Real-Time Molecular Sensing in Advanced Zero-Change CMOS-SOI Process

Adamopoulos, Christos; Buchbinder, Sidney; Zarkos, Panagiotis; Bhargava, Pavan; Gharia, Asmaysinh; Niknejad, Ali M.; Anwar, Mekhail; Stojanović, Vladimir

doi:10.1109/lssc.2021.3124234

Cited by 8 publications

(3 citation statements)

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“…Moreover, p-Si is a normal material for electronic integrated circuits. A fully integrated biosensing electronic–photonic system-on-chip (EPSoC) could be achieved using this platform [ 7 , 49 , 50 ].…”

Section: Discussionmentioning

confidence: 99%

“…Silicon photonics are a promising solution for large-scale and high-performance photonic integrated circuits (PICs) with a growing amount of applications in the optical interconnections [ 1 , 2 ], programmable photonics processors [ 3 , 4 ], and optical sensors [ 5 , 6 , 7 ]. Integrated silicon photonics sensors especially, have attracted great attention in the fields of environmental monitoring [ 8 ], industrial production [ 6 , 9 ], medical diagnosis [ 10 ], and chemical analysis [ 11 ], due to their high sensitivity, compact footprint, and mass production capabilities [ 12 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

“…Integrated silicon photonics sensors especially, have attracted great attention in the fields of environmental monitoring [ 8 ], industrial production [ 6 , 9 ], medical diagnosis [ 10 ], and chemical analysis [ 11 ], due to their high sensitivity, compact footprint, and mass production capabilities [ 12 , 13 ]. Besides high-performance optical sensors, readout equipment and interrogators are also crucial for lab-on-chip (LoC) photonic sensors [ 5 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

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Optical Temperature Sensor Based on Polysilicon Waveguides

Yin

Sun

et al. 2022

Sensors

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Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach–Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm/K and 85.7 pm/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications.

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Section: Discussionmentioning

confidence: 99%