Optical Temperature Sensor Based on Polysilicon Waveguides

Abstract

Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach–Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm/K and 85.7 pm/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications.

Lattice Damage, Optical and Electrical Properties Induced by H and C Ions Implantation in Nd:YLF Crystals

“…High optical conversion efficiencies and a high photon density can be obtained by the fabrication of a miniaturized waveguide. Given the increasing demand for compact devices (for instance, high-performance optical waveguides can be an important component of optoelectronic sensors), research on optical waveguides is constantly evolving [11][12][13]. As an important detection indicator for photoelectric sensors, the other spectroscopic and electrical properties also have great measurement value.…”