Fully Integrated Coherent LiDAR in 3D-Integrated Silicon Photonics/65nm CMOS

Bhargava, Pavan; Kim, T.; Poulton, Christopher V.; Notaros, Jelena; Yaacobi, Ami; Timurdogan, Erman; Baiocco, Christopher; Fahrenkopf, Nicholas M.; Kruger, Seth; Ngai, T.; Timalsina, Yukta P.; Watts, Michael R.; Stojanović, Vladimir

doi:10.23919/vlsic.2019.8778154

Cited by 35 publications

(31 citation statements)

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“…7. The components of the FMCW ranging system are off-chip in this demonstration; however, they could also be integrated on-chip, as demonstrated by Bhargava et al 34 . Linear frequency chirps with an excursion of 8.6 GHz and a ramp time of 80 μs are generated by directly modulating a 1,550 nm-wavelength distributed feedback (DFB) laser with a pre-distorted waveform obtained from an iterative learning method 35 .…”

Section: D Imagingmentioning

confidence: 98%

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

Zhang

Kwon

Henriksson

et al. 2022

Nature

191

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Three-dimensional (3D) imaging sensors allow machines to perceive, map and interact with the surrounding world1. The size of light detection and ranging (LiDAR) devices is often limited by mechanical scanners. Focal plane array-based 3D sensors are promising candidates for solid-state LiDARs because they allow electronic scanning without mechanical moving parts. However, their resolutions have been limited to 512 pixels or smaller2. In this paper, we report on a 16,384-pixel LiDAR with a wide field of view (FoV, 70° × 70°), a fine addressing resolution (0.6° × 0.6°), a narrow beam divergence (0.050° × 0.049°) and a random-access beam addressing with sub-MHz operation speed. The 128 × 128-element focal plane switch array (FPSA) of grating antennas and microelectromechanical systems (MEMS)-actuated optical switches are monolithically integrated on a 10 × 11-mm2 silicon photonic chip, where a 128 × 96 subarray is wire bonded and tested in experiments. 3D imaging with a distance resolution of 1.7 cm is achieved with frequency-modulated continuous-wave (FMCW) ranging in monostatic configuration. The FPSA can be mass-produced in complementary metal–oxide–semiconductor (CMOS) foundries, which will allow ubiquitous 3D sensors for use in autonomous cars, drones, robots and smartphones.

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Section: D Imagingmentioning

confidence: 98%

A large-scale microelectromechanical-systems-based silicon photonics LiDAR

Zhang

Kwon

Henriksson

et al. 2022

Nature

191

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“…Another key challenge for SiPho is the integration of the photonic circuitry with the driving electronics, either through heterogeneous or monolithic integration. This aspect is pivotal for OPA-LiDAR as well, as electric signals will be used to drive it and will be needed as sensor output; for this reason, in the last few years, several works have been focusing on combining on a single chip all the LiDAR electronics and photonics components [126], [131], [139], [152]. Monolithic integration is one of the techniques that can combine electronics and photonics [126], however CMOS design rules limits the photonics circuit design and ultimately the OPA performance.…”

Section: Integration With Driving Electronicsmentioning

confidence: 99%

“…A promising solution to achieve seamless heterogeneous integration is to use 3-D integration platforms, to optimize the two processes separately, and then combine them, e.g. using oxide bonding [139], [152].…”

Section: Integration With Driving Electronicsmentioning

confidence: 99%

A Review and Perspective on Optical Phased Array for Automotive LiDAR

Hsu

Solano-Rivas

et al. 2021

IEEE J. Select. Topics Quantum Electron.

170

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“…As an all-solid-state beam steering technology, optical phased array (OPA) is promising in light detection and ranging (LiDAR) fields, such as autonomous driving, three-dimensional imaging, and mapping. Many researches related to OPA have been reported [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20], and it is widely considered to be a key sensing modality for reliable autonomous systems, most notably for self-driving cars [21]. OPA is also promising in the field of free space optical communications, and there have been some related reports in recent years [22][23][24][25][26][27].…”

Section: Introductionmentioning

confidence: 99%