2001
DOI: 10.1016/s0038-1101(01)00084-3
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Fully depleted SOI CMOS technology for heterogeneous micropower, high-temperature or RF microsystems

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Cited by 87 publications
(29 citation statements)
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“…Fully-depleted n-type SOl transistors were fabricated in a SOl wafer with doping concentration (NA) of 10 1 5 cm-3 and buried oxide thickness of 390 nm, with a 31 nm-thick gate oxide and a silicon layer with final thickness of 80 nm [8]. …”
Section: Device Characteristicsmentioning
confidence: 99%
“…Fully-depleted n-type SOl transistors were fabricated in a SOl wafer with doping concentration (NA) of 10 1 5 cm-3 and buried oxide thickness of 390 nm, with a 31 nm-thick gate oxide and a silicon layer with final thickness of 80 nm [8]. …”
Section: Device Characteristicsmentioning
confidence: 99%
“…The studied ULP diodes have been fabricated according to the fully-depleted SOI process described in (5), which features silicon film thickness (t Si ) of 80nm, and gate (t oxf ) and buried oxide (t oxb ) thickness of 31 nm and 390 nm, respectively. In all cases, transistors present channel length L=2μm and channel width W=100μm.…”
Section: Resultsmentioning
confidence: 99%
“…RF APPLICATIONS A variety of circuit design method, can be used to improve high temperature performance of microelectronics [8]. For analog applications, the stability of the circuit performance in terms of gain, matching, bandwidth, etc.…”
Section: Zero-temperature-coefficient Point Analysismentioning
confidence: 99%