Full-wave 3D analysis of wave scattering on SAW-structures with finite aperture

Zidek, H.P.; Baghai-Wadji, A.R.; Manner, O.

doi:10.1109/ultsym.1993.339688

Cited by 6 publications

(5 citation statements)

References 7 publications

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“…Inserting equation (15) in equation ( 4) leads to a integral which can be evaluated in closed form. The result is…”

Section: The Charge Density On a Idts With Arbitrary Shapesmentioning

confidence: 99%

“…Actually, other types of acoustic wave propagations, such as Rayleigh wave, are also important and need be investigated for the application of piezoelectric coupled structures with IDT. Baghai-Wadji et al [14][15][16] analysed the metal resistance, diffraction and wave scattering field of SAW devices by utilizing 2D interface GFM in their papers, The influence of charge induced by the generated acoustic wave propagating in the transducer has not been considered.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Field analysis and calculation of interdigital transducers with arbitrary finger shapes

Wang¹,

Tang²,

Chen³

et al. 2006

J. Phys. D: Appl. Phys.

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The interdigital transducer (IDT) is a key component in surface-acoustic wave (SAW) and acousto-optical devices and has extensive applications in signal processing and optical communication at present. Properties of the acoustic field are mainly dominated by the geometric shapes of the electrodes (i.e. fingers) of the IDT and the piezoelectric characteristics of the substrate. However, the studies on excitation and acoustic wave field characteristics of IDTs are still not matured or perfect. In this paper, the 2D interface Green's function method (GFM) for simulating numerically the SAW field of IDTs with arbitrary finger shapes is presented. The electric charge densities originated from the electrostatic field and the generated SAW on the IDT electrodes are calculated first using the 2D interface GFM. Then the charge density distribution as the distributed source of SAW used to calculate the SAW field. IDT with arbitrary finger shapes can be treated. As an example, the properties of a SAW field generated by focused IDTs with the shape of concentric circular arc fingers on Y–Z LiNbO3 and c-oriented PZT substrates are also analysed and discussed. The method can be applied to numerical analysis of IDTs with arbitrary finger shapes, such as broadband chirp transducers, curved-finger transducers and finger-length weighted transducers.

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“…Inserting equation (15) in equation ( 4) leads to a integral which can be evaluated in closed form. The result is…”

Section: The Charge Density On a Idts With Arbitrary Shapesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Field analysis and calculation of interdigital transducers with arbitrary finger shapes

Wang¹,

Tang²,

Chen³

et al. 2006

J. Phys. D: Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…[12]- [17]). However, a rigorous description should encompass all wave generation, propagation and detection phenomena together with electrostatic effects within the quasi static approximation [18], [19]. The spatial Green's function of the surface of a piezoelectric half-space is in this sense the most elementary yet complete description of three-dimensional effects.…”

Section: Introductionmentioning

confidence: 99%

Surface Green's function of a piezoelectric half-space

Laude

Jerez-Hanckes

Ballandras

2006

IEEE Trans. Ultrason., Ferroelect., Freq. Contr.

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The computation of the two-dimensional harmonic spatial-domain Green's function at the surface of a piezoelectric half-space is discussed. Starting from the known form of the Green's function expressed in the spectral domain, the singular contributions are isolated and treated separately. It is found that the surface acoustic wave contributions, i.e. poles in the spectral Green's function, give rise to an anisotropic generalization of the Hankel function H(2) 0 , the spatial Green's function for the scalar two-dimensional wave equation. The asymptotic behavior at infinity and at the origin (for the electrostatic contribution) are also explicitely treated. The remaining non-singular part of the spectral Green's function is obtained numerically by a combination of fast Fourier transform and quadrature. Illustrations are given in the case of a substrate of Y-cut lithium niobate.

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“…The 20 µm zoom (f ) of the amplitude (the inset in (e) indicates the relative position) confirms the wave reflection preferably under an angle of 25 • with respect to the horizontal propagation direction. For the correct interpretation of the results, full three-dimensional simulations are needed [135,136].…”

Section: Scatteringmentioning

confidence: 99%

Surface acoustic wave-assisted scanning probe microscopy—a summary

Hesjedal

2009

Rep. Prog. Phys.

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Elastic properties of nanoscopic materials, structures and thin films are important parameters controlling their growth, as well as their optical and electronic properties. Acoustic microscopy is a well-established method for elastic imaging. In order to overcome its micrometer-scale diffraction-limited lateral resolution, scanning probe microscopy-based acoustic near-field techniques have been developed. Among the acoustic modes used for microscopy, surface acoustic waves (SAWs) are especially suited for probing very small and thin objects due to their localization in the vicinity of the surface. Moreover, the study of SAWs is crucial for the design of frequency filter devices as well as for fundamental physical studies, for instance, the probing of composite fermions in two-dimensional electron systems. This review discusses the capabilities and limitations of SAW-based scanning probe microscopy techniques. Particular emphasis is laid on the review of surface acoustic waves and their interaction with elastic inhomogeneities. Scattering, diffraction and wave localization phenomena will be discussed in detail. Finally, the possibilities for quantitative acoustic microscopy of objects on the nanoscale, as well as practical applications, are presented.

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Full-wave 3D analysis of wave scattering on SAW-structures with finite aperture

Cited by 6 publications

References 7 publications

Field analysis and calculation of interdigital transducers with arbitrary finger shapes

Field analysis and calculation of interdigital transducers with arbitrary finger shapes

Surface Green's function of a piezoelectric half-space

Surface acoustic wave-assisted scanning probe microscopy—a summary

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