2010
DOI: 10.1088/0957-0233/21/10/105310
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Full-field refractive index distribution measurement of a gradient-index lens with heterodyne interferometry

Abstract: A light beam coming from a circular heterodyne light source with an electro-optic modulator is incident on a gradient-index lens obliquely. The reflected light passes through an analyzer and an imaging lens, and is recorded by a fast CMOS camera. A group of periodic sinusoidal segments recorded by each pixel is modified, and its associated phase is derived with a unique technique. The processes are applied to other pixels; the two-dimensional phase distribution can be obtained similarly. The estimated data are… Show more

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Cited by 5 publications
(4 citation statements)
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References 28 publications
(43 reference statements)
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“…The incident light E 0 is linearly polarized with a wavelength of λ, and the polarization direction of 45 • with respect to the x-axis was divided into transmitted light E t and diffracted light E d by the top grating structure. According to the Jones matrix calculation [21,22], we can calculate the electric fields of E t and E d , and they can be written as…”
Section: Principle Of Diffraction-based Overlay (Dbo) Measurementmentioning
confidence: 99%
“…The incident light E 0 is linearly polarized with a wavelength of λ, and the polarization direction of 45 • with respect to the x-axis was divided into transmitted light E t and diffracted light E d by the top grating structure. According to the Jones matrix calculation [21,22], we can calculate the electric fields of E t and E d , and they can be written as…”
Section: Principle Of Diffraction-based Overlay (Dbo) Measurementmentioning
confidence: 99%
“…)→AN1(45 • )→D1. According to the Jones matrix calculation [13][14][15], we can calculate the electric field of the lights passing through these two paths as 𝐸 , , and 𝐸 , , , and they can be written as…”
Section: Moving-grating-based Heterodyne Light Sourcementioning
confidence: 99%
“…According to the arrangement of the optical configuration, the interference signal detected by detector D1 is composed of the p-polarization of the positive first-order diffracted light from G2 and the s-polarization of the positive first-order diffracted light from G1. After calculating the Jones matrix, this signal can be written as According to the Jones matrix calculation [13][14][15], we can calculate the electric field of the lights passing through these two paths as E t,G1+1,S and E r,G2+1,P , and they can be written as…”
Section: Moving-grating-based Heterodyne Light Sourcementioning
confidence: 99%
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