Full closed-loop controls of micro/nano positioning system with nonlinear hysteresis using micro-vision system

Gan, Jinqiang; Zhang, Xianmin; Hai, Li; Wu, Heng

doi:10.1016/j.sna.2017.02.013

Cited by 44 publications

(12 citation statements)

References 29 publications

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“…The pose of the robot end-effector relative to the desired feature point of the target object is obtained according to the image information, and the relative pose is generated by comparing the current pose of the target with the desired pose. The motion command of the robot given by the relative pose is transmitted to the robot motion controller, and then the robot is controlled to move [67].…”

Section: Microscopic Visual Servoing Controlmentioning

confidence: 99%

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

et al. 2019

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Micromanipulation is an interdisciplinary technology that integrates advanced knowledge of microscale/nanoscale science, mechanical engineering, electronic engineering, and control engineering. Over the past two decades, it has been widely applied in the fields of MEMS (microelectromechanical systems), bioengineering, and microdevice integration and manufacturing. Microvision servoing is the basic tool for enabling the automatic and precise micromanipulation of microscale/nanoscale entities. However, there are still many problems surrounding microvision servoing in theory and the application of this technology’s micromanipulation processes. This paper summarizes the research, development status, and practical applications of critical components of microvision servoing for micromanipulation, including geometric calibration, autofocus techniques, depth information, and visual servoing control. Suggestions for guiding future innovation and development in this field are also provided in this review.

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Section: Microscopic Visual Servoing Controlmentioning

confidence: 99%

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

et al. 2019

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“…Owing to the simple mechanism and principle, many researchers have adopted the lever amplifier to obtain a desired stroke. For instance, Gan et al [57] used a lever amplifier to amplify the stroke of PEA. More researchers, such as Bhagat et al [58], Li et al [59], Dao et al [60], Qu et al [61] and Ren et al [62], used a similar lever amplifier.…”

Section: Lever-type Amplifiermentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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“…Fatikow et al [16] used visual feedback to extend automated closed-loop positioning based on different external sensors, and the integration of mobile micro-robots into a specific system can be done fully automatically. A micro-vision system (MVS) was used to obtain feedback signals online, which illustrates that a full closed-loop tracking control can be developed to enhance the positioning accuracy of micro/nano-positioning systems [17]. The main disadvantage of visual inspection is that the sampling rate is too slow to measure a relatively rapid tracking motion.…”

Section: Introductionmentioning

confidence: 99%

Development of a 3-PRR Precision Tracking System with Full Closed-Loop Measurement and Control

Xie

Qiu

Zhang

2019

Sensors

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A 3-PRR (three links with each link consisting of a prismatic pair and two rotating pairs) parallel platform was designed for application in a vacuum environment. To meet the requirement of high tracking accuracy of the 3-PRR parallel platform, a full closed-loop control precision tracking system with laser displacement sensors and linear grating encoders was analysed and implemented. Equally-spaced laser displacement sensors and linear grating encoders were adopted not only for measurement but also for feedback control. A feed-forward control method was applied for comparison before conducting the closed-loop feedback control experiments. The closed-loop control experiments were conducted by adopting the PI (proportion and integration) feedback control and RBF (radial basis function) neural network control algorithms. The experimental results demonstrate that the feed-forward control, PI feedback control, and RBF neural-network control algorithms all have a better control effect than that of semi-closed-loop control, which proves the validity of the designed full closed-loop control system based on the combination of laser displacement sensors and linear grating encoders.

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Full closed-loop controls of micro/nano positioning system with nonlinear hysteresis using micro-vision system

Cited by 44 publications

References 29 publications

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

Development of a 3-PRR Precision Tracking System with Full Closed-Loop Measurement and Control

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