From MEMS to NEMS

Gotszalk, Teodor

doi:10.1007/978-3-030-21496-8_12

Cited by 4 publications

(1 citation statement)

References 36 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The progress in micro-and nano-fabrication is closely correlated with the development and progress in micro-and nano-characterization. Scanning electron microscopy (SEM) is a perfect technique for micro-/nano-object imaging [1,5] and movement measurements [2,3] both in high or environmental vacuum conditions and at various temperatures ranging from elevated to low temperatures [6,7]. In SEM technology the focused electron beam (e-beam) is used to probe a specimen and the reflected and/or scattered electrons or ions are analysed with the use of different types of detectors.…”

Section: Introductionmentioning

confidence: 99%

Metrology and Measurement Systems

Orłowska¹,

Mognaschi²,

Kwoka³

et al. 2020

View full text Add to dashboard Cite

Scanning electron microscopy (SEM) is a perfect technique for micro-/nano-object imaging [1] and movement measurement [2,3] both in high and environmental vacuum conditions and at various temperatures ranging from elevated to low temperatures. In our view, the magnetic field expanding from the pole-piece makes it possible to characterize the behaviour of electromagnetic micro-and nano-electromechanical systems (MEMS/NEMS) in which the deflection of the movable part is controlled by the electromagnetic force. What must be determined, however, is the magnetic field expanding from the e-beam column, which is a function of many factors, like working distance (WD), magnification and position of the device in relation to the e-beam column. There are only a few experimental methods for determination of the magnetic field in a scanning electron microscope. In this paper we present a method of the magnetic field determination under the scanning electron column by application of a silicon cantilever magnetometer. The micro-cantilever magnetometer is a silicon micro-fabricated MEMS electromagnetic device integrating a current loop of lithographically defined dimensions. Its stiffness can be calibrated with a precision of 5% by the method described by Majstrzyk et al. [4]. The deflection of the magnetometer cantilever is measured with a scanning electron microscope and thus, through knowing the bias current, it is possible to determine the magnetic field generated by the e-beam column in a defined position and at a defined magnification.

show abstract

Section: Introductionmentioning

confidence: 99%

Metrology and Measurement Systems

Orłowska¹,

Mognaschi²,

Kwoka³

et al. 2020

View full text Add to dashboard Cite

show abstract

A thermosensitive electromechanical model for detecting biological particles

SoltanRezaee

Bodaghi

Farrokhabadi

2019

Sci Rep

View full text Add to dashboard Cite

Miniature electromechanical systems form a class of bioMEMS that can provide appropriate sensitivity. In this research, a thermo-electro-mechanical model is presented to detect biological particles in the microscale. Identification in the model is based on analyzing pull-in instability parameters and frequency shifts. Here, governing equations are derived via the extended Hamilton’s principle. The coupled effects of system parameters such as surface layer energy, electric field correction, and material properties are incorporated in this thermosensitive model. Afterward, the accuracy of the present model and obtained results are validated with experimental, analytical, and numerical data for several cases. Performing a parametric study reveals that mechanical properties of biosensors can significantly affect the detection sensitivity of actuated ultra-small detectors and should be taken into account. Furthermore, it is shown that the number or dimension of deposited particles on the sensing zone can be estimated by investigating the changes in the threshold voltage, electrode deflection, and frequency shifts. The present analysis is likely to provide pertinent guidelines to design thermal switches and miniature detectors with the desired performance. The developed biosensor is more appropriate to detect and characterize viruses in samples with different temperatures.

show abstract

Transitions between electron emission and gas breakdown mechanisms across length and pressure scales

Garner

Meng

et al. 2020

Journal of Applied Physics

View full text Add to dashboard Cite

This Perspective outlines theoretical, simulation, and experimental studies linking electron emission and gas breakdown. Many studies have investigated field emission-driven microscale gas breakdown, including recent reviews [Garner et al., IEEE Trans. Plasma Sci. 48, 808–824 (2020); Fu et al., Plasma Res. Express 2, 013001 (2020)]. This Perspective focuses on generalizing field emission-driven microscale gas breakdown to consider the contribution of other forms of electron emission, specifically thermionic and space-charge limited. Recent theoretical studies have unified thermionic, field, and space-charge limited emission with and without collisions to derive “nexuses” where the individual solutions match, indicating transitions in the mechanisms. Reducing device size to nanoscale at atmospheric pressure leads to a transition from field emission to space-charge limited emission for nitrogen at ∼250 nm. This Perspective summarizes the derivation of these nexuses and future extensions. We next describe simulation and theoretical studies for field emission-driven microscale gas breakdown and highlight how the nexus theory may be integrated to account for temperature, space-charge, and pulse parameters. Finally, we summarize the development of optical techniques to assess microscale gas breakdown and recent nanoscale experiments at atmospheric pressure that suggest that space-charge may begin to contribute to field emission prior to gas breakdown. We highlight the combination of theory, simulation, and experiment to link electron emission and gas breakdown mechanisms across length, pressure, and temperature scales for applications that include vacuum electronics, pulsed power, and medicine.

show abstract

From MEMS to NEMS

Cited by 4 publications

References 36 publications

Metrology and Measurement Systems

Metrology and Measurement Systems

A thermosensitive electromechanical model for detecting biological particles

Transitions between electron emission and gas breakdown mechanisms across length and pressure scales

Contact Info

Product

Resources

About