Friction characteristics of the curved sidewall surfaces of a rotary MEMS device in oscillating motion

Wu, Jie; Shao, Wei; Miao, Jianmin

doi:10.1088/0960-1317/19/6/065020

Cited by 5 publications

(4 citation statements)

References 24 publications

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“…Also, its elastic modulus (E) and roughness do not vary, unlike those of a polysilicon structural film, which depend on the conditions used to deposit and anneal the polysilicon structural film and hence vary from wafer to wafer and sometimes even on the same wafer from chip to chip [35,36]. Since both E and roughness of the contacting sidewall surfaces influence their friction and wear characteristics, variation in them can result in inconsistent results [1,4,6,8,21,22,24,27]. Therefore, owing to the usage of a SCS film as its device layer, the results obtained using the sidewall friction and wear test microinstrument reported in this paper are more consistent than those obtained using the polysilicon-based sidewall friction and wear test microinstruments reported previously.…”

Section: Resultsmentioning

confidence: 99%

“…Therefore, owing to the variable material properties and surface roughness of polysilicon structural films, the results obtained in all of the above-mentioned studies showed significant device-to-device scatter, which made it difficult to draw a meaningful conclusion [4,6,8,21,22,24]. Only four SCS-based friction test devices have been reported to date [1,[26][27][28][29]. The first SCS-based friction test device was reported in 1995, by Prasad et al, who used them to study the friction characteristics of oxide coated sidewalls [28].…”

Section: Introductionmentioning

confidence: 99%

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Single-crystal-silicon-based microinstrument to study friction and wear at MEMS sidewall interfaces

Ansari¹,

Ashurst²

2012

J. Micromech. Microeng.

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Since the advent of microelectromechanical systems (MEMS) technology, friction and wear are considered as key factors that determine the lifetime and reliability of MEMS devices that contain contacting interfaces. However, to date, our knowledge of the mechanisms that govern friction and wear in MEMS is insufficient. Therefore, systematically investigating friction and wear at MEMS scale is critical for the commercial success of many potential MEMS devices. Specifically, since many emerging MEMS devices contain more sidewall interfaces, which are topographically and chemically different from in-plane interfaces, studying the friction and wear characteristics of MEMS sidewall surfaces is important. The microinstruments that have been used to date to investigate the friction and wear characteristics of MEMS sidewall surfaces possess several limitations induced either by their design or the structural film used to fabricate them. Therefore, in this paper, we report on a single-crystal-silicon-based microinstrument to study the frictional and wear behavior of MEMS sidewalls, which not only addresses some of the limitations of other microinstruments but is also easy to fabricate. The design, modeling and fabrication of the microinstrument are described in this paper. Additionally, the coefficients of static and dynamic friction of octadecyltrichlorosilane-coated sidewall surfaces as well as sidewall surfaces with only native oxide on them are also reported in this paper.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Single-crystal-silicon-based microinstrument to study friction and wear at MEMS sidewall interfaces

Ansari¹,

Ashurst²

2012

J. Micromech. Microeng.

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“…In our design, we employ in-plane electrostatic comb-drive pair actuation mechanism for its simplicity and relative ease of fabrication [ 22 , 23 , 24 ]. The schematic of the electrostatic actuation based PTG is depicted in Figure 2 .…”

Section: Pitch Tunable Diffraction Grating (Ptg)mentioning

confidence: 99%

MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Muttikulangara

Barański

Rehman

et al. 2017

Sensors

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Diffraction gratings are among the most commonly used optical elements in applications ranging from spectroscopy and metrology to lasers. Numerous methods have been adopted for the fabrication of gratings, including microelectromechanical system (MEMS) fabrication which is by now mature and presents opportunities for tunable gratings through inclusion of an actuation mechanism. We have designed, modeled, fabricated and tested a silicon based pitch tunable diffraction grating (PTG) with relatively large resolving power that could be deployed in a spaceborne imaging spectrometer, for example in a picosatellite. We have carried out a detailed analytical modeling of PTG, based on a mass spring system. The device has an effective fill factor of 52% and resolving power of 84. Tuning provided by electrostatic actuation results in a displacement of 2.7 sans-serifμnormalm at 40 V. Further, we have carried out vibration testing of the fabricated structure to evaluate its feasibility for spaceborne instruments.

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“…In the current design, the in-plane electrostatic comb-drive pair actuation mechanism was employed for its simplicity and relative ease of fabrication [124,125,126].…”

Section: Micromechanical Implementationmentioning

confidence: 99%

Micromachined tunable diffraction grating for diverse imaging in integral field spectroscopy

Sanathanan¹

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This report presents the design and development of micro-optical components for a computational imaging spectrometer. The main elements that were involved in the optical design include a microlens array that samples the spatial information and a diffraction grating that provides spectral information. One of the significant drawbacks of scanning based imaging systems is the low light collection efficiency. The new technique proposed in this study used a quasi-snapshot technology that significantly improves the optical throughput. In a quasi-snapshot system, multiple images are captured with the optical system that can tune its optical transfer function (OTF). In this work, tunable micro-optics were investigated for the realization preparation of presentations, articles, and thesis; Python package distribution especially numpy, mathplotlib; Mendeley for reference managing; Inkscape for vector graphics editor; KLayout for mask designing; and Fiji-ImageJ for image processing and analysis. I would also like to thank all others, whose direct or indirect help has benefited me during my stay at Nanyang Technological University. I express my gratitude towards all those unseen and unknown people associated with the internet, and the plethora of technical websites, forums, groups and mailing lists which have helped me with study material for my research work. Last but not the least, I would like to thank my parents and family members for their eternal love and extensive support all throughout my career.

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Friction characteristics of the curved sidewall surfaces of a rotary MEMS device in oscillating motion

Cited by 5 publications

References 24 publications

Single-crystal-silicon-based microinstrument to study friction and wear at MEMS sidewall interfaces

Single-crystal-silicon-based microinstrument to study friction and wear at MEMS sidewall interfaces

MEMS Tunable Diffraction Grating for Spaceborne Imaging Spectroscopic Applications

Micromachined tunable diffraction grating for diverse imaging in integral field spectroscopy

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