2002
DOI: 10.1016/s0924-4247(01)00821-4
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Friction and wear properties in MEMS

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Cited by 82 publications
(44 citation statements)
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“…It reveals the microstructure possesses low friction coefficient. This similar result was also investigated by other research [37]. The friction coefficient as detected by SPM is lower than the macro-friction.…”
Section: Friction Testsupporting
confidence: 88%
“…It reveals the microstructure possesses low friction coefficient. This similar result was also investigated by other research [37]. The friction coefficient as detected by SPM is lower than the macro-friction.…”
Section: Friction Testsupporting
confidence: 88%
“…This method can easily be utilized to explore a variety of additional properties that depend on roughness, including the type of roughness (patterned vs. random), range of lateral and vertical roughness (from a few nm to microns), and change in elastic modulus by using different UV curable polymers. Thus, this method can be applied in a straightforward way to mimic and understand the tribological behavior of a number of real world applications and devices [57,58].…”
Section: Discussionmentioning
confidence: 99%
“…Characterization and control of such phenomena are of key importance in every kind of machinery [3,4], as well as biological systems at different scales [5]. The dynamics of any two objects rubbed against each other is ultimately governed by atomic-scale interactions between the microscopic asperities that build up the effective contact area [6].…”
mentioning
confidence: 99%