Frequency Symmetry Comparison of Cobweb-Like Disk Resonator Gyroscope With Ring-Like Disk Resonator Gyroscope

Fan, Bo; Guo, Shuwen; Cheng, Mengmeng; Yu, Lei; Zhou, Ming; Hu, Wenbin; Zheng, Fen; Bu, Feng; Xu, Dacheng

doi:10.1109/led.2019.2930632

Cited by 24 publications

(18 citation statements)

References 26 publications

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“…Gyroscope is the sensor aiming at measuring the angular variance or angular rate based on the Coriolis force. MEMS gyroscopes have been applied widely in various electronics and navigation systems and plenty of different structures have been proposed including the resonant gyroscope [52][53][54] and the vibratory gyroscope [55,56] as shown in Figure 3e-f. Figure 3e depicts a resonant disk gyroscope which has two resonant modes [52]. Through applied voltage, the disk will firstly vibrate at the drive mode or the 0 • mode.…”

Section: Mems Physical Sensormentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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Section: Mems Physical Sensormentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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“…There are 16 electrodes around the disk resonator. There are also internal electrodes for electrostatic tuning [ 18 , 19 , 20 ].…”

Section: Architecture and Motion Model Of Disk Gyroscopementioning

confidence: 99%

A Quick Start Method for MEMS Disk Resonant Gyroscope

Liu

Zhang

2021

Sensors

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High-precision disk resonator gyroscope has a high quality factor in order to improve the performance of the gyroscope, as the high quality factor can lead to a long starting time. In this paper, a control system of the driving loop of the disk MEMS resonant gyroscope with the quick start is designed. The control system has functions of quick frequency locking and fast step response. Coarse-precision mode transition system is designed for quick frequency locking. A large-small mode transition system is designed for fast step response. The correctness of the design is verified by circuit test. The test results show that the start-up time is reduced by over 80% compared with the traditional control loop.

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“…mm, the diameter of the central anchor is 1.7 mm, the width of the polygonal ring is 13 μm, and the width of the lumped mass on the ring is 77 μm. As the cobweb-like DRG has an extremely highly symmetric structure, its damping asymmetry and stiffness asymmetry are much smaller than in conventional DRGs [18]. Table III presents After electrostatic tuning of the quadrature error, the resonance frequency of the cobweb-like DRG was tested at room temperature.…”

Section: A Test Platform and Gyro Parametersmentioning

confidence: 99%

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

et al. 2020

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The structural asymmetry of the MEMS rate-integrating gyro (RIG) mode produces a threshold and an angle-dependent bias (ADB) that cause gyroscopes operating in this mode to stop working at input rates below the threshold and degrade the linearity of the output angle. This defect in the RIG output angle is actually caused by a precession angular-rate bias that results from both damping asymmetry (anisodamping) and stiffness asymmetry (anisostiffness). This paper describes a novel compensation method based on Fourier series fitting combined with a multiple iteration technique. The proposed compensation method can significantly reduce both the input rate threshold and ADB. Simulations indicate that the threshold and ADB caused by anisodamping and anisostiffness can be reduced by three orders of magnitude. An experimental application of this method produced a MEMS RIG threshold as low as 0.05° per second, representing an improvement of two orders of magnitude and lower than has previously been reported. INDEX TERMS MEMS rate-integrating gyro, Asymmetric damping, Asymmetric stiffness, Threshold.

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Frequency Symmetry Comparison of Cobweb-Like Disk Resonator Gyroscope With Ring-Like Disk Resonator Gyroscope

Cited by 24 publications

References 26 publications

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

A Quick Start Method for MEMS Disk Resonant Gyroscope

A Novel Compensation Method for Eliminating Precession Angular-Rate Bias in MEMS Rate-Integrating Gyroscopes

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