Cross-layer resiliency has become a critical deciding factor for any successful product. This chapter focuses on monitor circuits that are essential in realizing the cross-layer resiliency. The role of monitor circuits is to establish a bridge between the hardware and other layers by providing information about the devices and the operating environment in run-time. This chapter explores delay-based monitor circuits for design automation with the existing cell-based design methodology. The chapter discusses several design techniques to monitor parameters of threshold voltage, temperature, leakage current, critical delay, and aging. The chapter then demonstrates a reconfigurable architecture to monitor multiple parameters with small area footprint. Finally, an extraction methodology of physical parameters is discussed for model-hardware correlation. Utilizing the cell-based design flow, delay-based monitors can be placed inside the target digital circuit and thus a better correlation between monitor and target circuit behavior can be realized.