High efficiency frequency quadrupling of Nd:YAG laser radiation was achieved in lithium triborate using a three-stage design. 3.2 mJ was measured at 266 nm corresponding to 28% overall conversion efficiency. Temperature angular tuning was characterized. Preliminary experiments at 10 kHz produced an average power above 1 W in the deep-ultraviolet. OCIS codes: 140.3610, 140.3580, 190.2620
Advantages of three step conversion schemesThere is a strong demand for high-power deep ultraviolet lasers which are required for many scientific fields, medical and industrial applications like photolithography, micromachining, surface processing, photolysis, eye-surgery, and laser-induced fluorescence. Similar to the shift that occurred in the early 2000's in the green spectral range, when compact and efficient frequency-doubled diode-pumped lasers replaced argon and copper-vapor gas lasers, all-solid state systems are being rapidly developed to progressively replace traditional eximer, nitrogen and argon lasers at deeper and deeper ultraviolet wavelengths.Ultraviolet solid-state systems are usually based on cascaded frequency doubling and mixing of a fundamental laser infrared radiation originating from the 4 F 3/2 → 4 I 11/2 laser transition in the Nd:YAG crystal. Commercial systems generating tens of Watts at 355 nm thanks to two-step frequency tripling in nonlinear crystals are now available with sufficient reliability to satisfy end-user demands.Frequency quadrupling to 266 nm faces harder difficulties. Architectures rely traditionally on cascaded secondharmonic generation (SHG). A first stage efficiently converts the fundamental infrared beam to the visible green light by frequency doubling (ω + ω → 2ω) of the fundamental laser at 1064.2 nm. Another SHG of the generated 532.1-nm radiation is subsequently performed to produce the DUV line at 266 nm (2ω + 2ω → 4ω). Phase-matching at deeper UV wavelengths, hence closer to the absorption edge of the nonlinear crystals, requires higher birefringence to compensate for stronger chromatic dispersion. In addition to trivial optical transparency criteria, this narrows the choice of nonlinear crystals for this second stage to a few materials (Table 1).Deuterated potassium dihydrogen phosphate DKDP (KD 2 PO 4 ) has long been the preferred material at lowrepetition rate. Operating close to 90 • phase-matching 1 offers comfortable angular tolerance and good beam overlap thanks to vanishing spatial walk-off. However strong residual linear and non-linear absorptions and poor thermomechanical properties precludes the use of this mature material at high power. Beta-barium borate β -BBO (β -BaB 2 O 4 ) exhibits better thermal parameters and enough birefringence to permit even type II (eoe) phase-matching. As a consequence, tight angular tolerance and strong spatial walk-off effects set critical overall system constraints on beam size, divergence and stability. In addition BBO suffers from two-photon absorption (TPA) [2], as well as UV-induced photo-refractive aging that limits its DUV ou...