Freestanding Membranes for Unique Functionality in Electronics

Abstract

Epitaxy of single-crystalline materials laid the foundation for numerous electronics as a core technology. Nevertheless, because the single-crystalline epilayers are covalently bonded to substrates, only limited applications were explored. The recent development of layer transfer techniques has suggested another way involving the production of freestanding membranes that are free from substrates. In this review, we comprehensively catalog recent advances for freestanding-membrane-based electronics from transistors and memory storage to sensors and energy harvesters. We highlight their unique advantages, including flexibility, unique physical coupling, heterointegrability, and costeffectiveness, and summarize their challenges and perspectives.

Functionalizing nanophotonic structures with 2D van der Waals materials

“…4f), 387,395 and other novel hetero-integrated devices. 68,396,397 Nanomembrane mass production could also be enabled with a reduced cost. 387,398–400…”

“…4f), 387,395 and other novel hetero-integrated devices. 68,396,397 Nanomembrane mass production could also be enabled with a reduced cost. 387,[398][399][400] By combining the 2D and 3D van der Waals material building blocks, vast playgrounds also unfold for 2D-materials-based photonic integrated circuits 3,4,25,66,279 (Fig.…”

Applications of remote epitaxy and van der Waals epitaxy

“…In addition, the Al-N bond of AlN has a dipole moment, which also plays an important role in the adsorption of gas molecules. These features can be useful for sensor applications [ 93 ]. Figure 5 d shows four different adsorption sites on the AlN surface.…”

“…Moreover, SAW sensors can be applied to many fields by using surface acoustic wave deformation [ 121 – 134 ]. Figure 5 f shows a heterogeneous integrated structure of ion-selective membrane (ISM) on flexible GaN grown by remote epitaxy [ 74 , 93 ]. The sensor can monitor the concentration of ions in sweat, which can serve as an indicator for conditions such as hyponatremia, kidney failure and high blood pressure.…”

On the Role of the Sr3−xCaxAl2O6 Sacrificial Layer Composition in Epitaxial La0.7Sr0.3MnO3 Membranes

“…Nonetheless, in the last few years this field has experienced a major turn boosted by the development of synthetic approaches to detach these epitaxial oxides from the growth substrate and freely manipulate them. [13][14][15] In fact, the fabrication of new artificial heterostructures by assembling very dissimilar materials, their integration in conventional materials such as silicon, plastics, and 2D semiconductors, [16][17][18] and the possibility to obtain spontaneous shaped structures [19] is becoming a reality opening the possibility to study novel interface phenomena, nanoengineer their properties, and unlock strain states that might not be available by traditional epitaxial growth. [20][21][22] The use of a sacrificial layer is an appealing approach to fabricate and manipulate freestanding epitaxial complex oxides membranes.…”