Free-space-wave drop demultiplexing waveguide device fabricated by use of the interference exposure method

Abstract

Integration of free-space-wave add-drop multiplexers that consist of focusing grating couplers (FGCs) and distributed Bragg reflectors (DBRs) in thin-film waveguides have been investigated for construction of an intraboard wavelength-division-multiplexing optical interconnection. Compact optics of a Lloyd mirror configuration and a contact-type mask aligner were combined as an interference exposure system for fabrication of DBRs of 300 microm coupling length. DBRs were integrated with FGCs on a thin-film waveguide on a glass substrate for two-channel wavelength-drop demultiplexing from guided waves to free-space waves. Measured outcoupled wavelengths of two free-space waves from two pairs of a FGC and a DBR agreed with the design values of 845 and 849 nm.

Recent Advances in Resonant Waveguide Gratings

“…Moreover, RWGs provide thermal stability, robustness, and ease of fabrication, since the performance of a single RWG corresponds to tens of traditional thin‐film layers . A possible way to create a wavelength division (de)multiplexer is to use different gratings to in‐couple, out‐couple, and focus multiple wavelengths at different locations (see Figure f); a small aperture compatible with the beam size of a single mode vertical cavity surface emitting laser can be necessary . Another possibility is to use very thick waveguides in order to benefit from multiple diffraction orders and GMRs .…”

Modeling of multiple-optical-axis pattern-integrated interference lithography systems

“…(1). Expanding upon these foundations, IL has been demonstrated the ability to record a wide range of 1D, 2D, and 3D structures in a variety of materials that respond to wavelengths in the near-infrared [25,40], visible light [26,41], ultraviolet (UV) [24,42], deep-UV [12,43], and extreme-UV ranges [1,44,45].…”

Multi-Beam Interference Advances and Applications: Nano-Electronics, Photonic Crystals, Metamaterials, Subwavelength Structures, Optical Trapping, and Biomedical Structures

“…Two decades later, multiple MBIL exposures were proposed to generate more complex 2D patterns in a photoresist [138]. Since then, a wide range of structures have been recorded via MBIL using near-infrared [129,[139][140][141][142], visible light [18,31,32,62,88,[143][144][145][146][147][148][149][150][151][152][153], ultraviolet (UV) [62,77,78,99,115,[154][155][156][157][158][159][160], deep-UV [92,101,142,[161][162][163], and extreme-UV sources [164][165][166][167].…”