Fracture studies of diamond films on silicon

Mecholsky, John J.; Tsai, Yi‐Lin; Drawl, W.

doi:10.1063/1.350632

Cited by 21 publications

(6 citation statements)

References 11 publications

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“…The same effect has been observed for glazing and staining materials in relation to core materials used for all‐ceramic restorations 19, 28, 29. Compressive residual stresses can increase the loading capability and the usable fracture strength of these modified materials 22…”

Section: Discussionmentioning

confidence: 99%

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Effect of YSZ thin film coating thickness on the strength of a ceramic substrate

et al. 2007

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Although ceramics are used for many different biomedical applications they are brittle materials that can be compromised by surface defects when under stress. The objective of this study was to evaluate the effect of surface modification with an yttria-stabilized zirconia (YSZ) thin film coating on the strength of a machinable dental ceramic. Fifty bars (2 mm x 2 mm x 15 mm) were cut from ProCAD (Ivoclar-Vivadent) blocks. Specimens were wet-polished through 1200-grit SiC abrasive. One surface of each bar was sandblasted with 50 microm Al(2)O(3) abrasive (0.34 MPa). Specimens were further modified through the deposition of a sputtered YSZ thin film on the sandblasted surface. Different thin film thicknesses were evaluated: 1, 3, 5, and 7 microm. Depositions were performed using a radio frequency magnetron sputter system (working pressure of 15 mT, 150 degrees C, 30:1 Ar/O(2) gas ratio). Flexural strength measurements were carried out by three-point bending (span = 10 mm) in a servo-electric material testing system in DI water (37 degrees C). The results showed that the strength of porcelain significantly increased with the deposition of a 3-microm YSZ thick coating. A nonlinear relationship was observed between film thickness and strength. Strengthening of porcelain is shown through the application of a sputtered YSZ thin film. It is presumed that the strengthening mechanism is due to modification of surface flaws and/or surface residual stress by the applied thin film.

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Section: Discussionmentioning

confidence: 99%

“…Sputtering is a simple deposition process that can be used with different types of materials, including nonconductive materials such as ceramics. Ceramic coatings are widely employed in a variety of areas, including grinding, metal cutting, and as thermal sensors barriers 22…”

Section: Introductionmentioning

confidence: 99%

Effect of YSZ thin film coating thickness on the strength of a ceramic substrate

et al. 2007

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“…However, these methods of direct measurement come up with extreme difficulties for the cases of extremely thin films. Mecholsky et al 9 carried out indentation tests on 6-and 12 m-thick CVD diamond films on a silicon substrate to examine the fracture toughness. Although they reported the apparent fracture toughness of silicon coated with diamond, the individual fracture toughness of diamond films was not ob-tained since the indentation cracks always penetrated the interface.…”

Section: Introductionmentioning

confidence: 99%

Fracture toughness estimation of thin chemical vapor deposition diamond films based on the spontaneous fracture behavior on quartz glass substrates

Kamiya

Sato

Saka

et al. 1997

Journal of Applied Physics

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This article is on the experimental estimation of the fracture toughness of thin diamond film deposited by the microwave plasma chemical vapor deposition method on a quartz glass substrate. Because of their differences in the coefficient of thermal expansion, diamond films on a quartz glass substrate suffer tensile stress at room temperature and show various kinds of spontaneous fracture behavior, reflecting the mechanical properties of the films. On the basis of detailed observation of cracking patterns and also measuring the residual stress with the aid of Raman spectroscopy, the fracture toughness of the film having thickness of around 1 m has been estimated here satisfactorily without the help of any difficult microscopic experiment. The fracture toughness of the film of thickness 0.35 m is found to be around half of that obtained with much thicker films.

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“…Therefore, fracture related information is available for conformal films on deposition substrate materials ͑e.g., silicon͒ or, in limited quantities, for free-standing films. Mecholsky et al 3 report fracture strength measurements for 6 -12 m thick diamond on 2.7 mm thick silicon substrates. They found relatively low fracture strength values due to the influence of the underlying substrate but with an increase in strength over that of the weaker silicon substrate due to a compressive residual stress.…”

Section: Department Of Materials Science and Engineering Northwestermentioning

confidence: 99%

Fracture strength of free-standing chemically vapor-deposited diamond films

Steyer

Faber

Drory

1995

Applied Physics Letters

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Fracture studies of diamond films on silicon

Cited by 21 publications

References 11 publications

Effect of YSZ thin film coating thickness on the strength of a ceramic substrate

Effect of YSZ thin film coating thickness on the strength of a ceramic substrate

Fracture toughness estimation of thin chemical vapor deposition diamond films based on the spontaneous fracture behavior on quartz glass substrates

Fracture strength of free-standing chemically vapor-deposited diamond films

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