2016
DOI: 10.1016/j.sna.2016.04.010
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Four-electrode micropump with peristaltic motion

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Cited by 33 publications
(16 citation statements)
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“…The pump has to be small, consume low power, and be compatible with microtechnology. The pumping mechanisms known to date include piezoelectric [11][12][13][14][15], electrostatic [16][17][18][19][20], electromagnetic [21][22][23][24][25], and thermopneumatic [26][27][28][29][30] principles. However, each of them has inherent drawbacks.…”
Section: Introductionmentioning
confidence: 99%
“…The pump has to be small, consume low power, and be compatible with microtechnology. The pumping mechanisms known to date include piezoelectric [11][12][13][14][15], electrostatic [16][17][18][19][20], electromagnetic [21][22][23][24][25], and thermopneumatic [26][27][28][29][30] principles. However, each of them has inherent drawbacks.…”
Section: Introductionmentioning
confidence: 99%
“…This is mainly due to the large difference between the maximum voltage of standard CMOS circuits and the voltage needed to drive EOF micropumps. While MEMS micropumps based on electrostatic, piezoelectric or thermopneumatic actuators require voltages ranging from 5 V to 200 V to obtain high flow rate [30]- [33], EOF micropumps typically require voltages higher than 40 V [22], [24] up to several 100 V [23], [26], as shown in Fig. 2a.…”
Section: Introductionmentioning
confidence: 99%
“…The velocity of fluid particles at the wall equals the wall velocity due to the no-slip boundary condition; however, as we move towards the centre of the lumen, the velocity reduces. The mechanical actuation of the wall have been demonstrated in numerous systems that are driven by means of pneumatic [1315], electrostatic [16, 17], electromagnetic [18, 19], or piezoelectric [20, 21] actuators. Diaphragms that can be actuated electrically, using two control valves have been used to regulate the flow of fluids in the channels.…”
Section: Introductionmentioning
confidence: 99%