Formulas for Using Wave Plates in Ellipsometry*

Holmes, D. A.; Feucht, D. L.

doi:10.1364/josa.57.000466

Cited by 35 publications

(3 citation statements)

References 12 publications

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“…However, it has been shown [5][6][7][8] that the transmissions along the two axes are different. Therefore, the ratio T of the trans…”

Section: *Figures In Brackets Indicate the Literature References On Pmentioning

confidence: 99%

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A Fortran program for analysis of ellipsometer measurements

McCrackin¹

1969

118

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A general Fortran program is given that performs the calculations required to analyze ellipsometer measurements. This program replaces the program given in NBS Technical Note 242, entitled "A Fortran Program for Analysis of Ellipsometer Measurements and Calculation of Reflection Coefficients From Thin Films." The main changes from the previous program are: 1) the new program is in Fortran IV and V rather than Fortran II; 2) the relative transmission of the wave plate is considered in analyzing ellipsometer readings; 3) an improved method is used for calculating the refractive index of a film; 4) the form of the input data is improved; 5) a method for calculating and correcting for tilt of the reflecting surface is given; 6) an improved method of calculating confidence limits for the calculated values of thickness and refractive index of a film is used; and 7) a method for calculating the optical constants of an adsorbing film of given thickness is included.

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“…However, it has been shown [5][6][7][8] that the transmissions along the two axes are different. Therefore, the ratio T of the trans…”

Section: *Figures In Brackets Indicate the Literature References On Pmentioning

confidence: 99%

“…The value of p is to be calculated from readings P, A, and Q, and p . This calculation is based on the formulas derived by Holmes and Feucht [7], Modifying their equations 19…”

Section: From Ellipsometer Readingsmentioning

confidence: 99%

A Fortran program for analysis of ellipsometer measurements

McCrackin¹

1969

118

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“…Although both the x-to-y [10,11] and y-to-x [3,9] ratios are found in the literature, the latter appears more frequently and is adopted here. Following the notation of Azzam and Bashara [9] -6-3.…”

Section: Complex Polarization Ratiomentioning

confidence: 99%

Conventions and formulas for using the Mueller-Stokes calculus in ellipsometry

Hauge

Müller

Smith³

1980

Surface Science

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An analysis of the compatability of ellipsometry conventions with the Mueller-Stokes calculus has shown that for the two approaches to be consist~ ent, modifications to the 1968 Nebraska ellipsometry conventions are neces~ sary. A sign convention is proposed which specifies the ellipticity angle and the fourth Stokes parameter to be positive when the tip of the instantaneous electric-field vector describes a right~handed helix in space. Polarization of this type will be designa"ted as right-handed and represented by a point on the · northern half of the Poincare sphere. The consequences of using this conven-.

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Ellipsometry in Corrosion Technology

Hayfield

1972

Advances in Corrosion Science and Technology

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Formulas for Using Wave Plates in Ellipsometry*

Cited by 35 publications

References 12 publications

A Fortran program for analysis of ellipsometer measurements

A Fortran program for analysis of ellipsometer measurements

Conventions and formulas for using the Mueller-Stokes calculus in ellipsometry

Ellipsometry in Corrosion Technology

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