Abstract:Uniform tunnel pits are fabricated with equally spaced intervals while avoiding excessive dissolution of an aluminum surface with a polyimide material as a mask layer. To increase the area S of capacitance C, uniform tunnel pits are made selectively to increase the aluminum surface area S into the vertical direction on Al foil. In this article, the relationship between the surface area and the etching tunnel is analyzed through selective electrochemical etching with patterning on aluminum foil, and the control… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.