2009
DOI: 10.1116/1.3002388
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Formation of single electron transistors in single-walled carbon nanotubes with low energy Ar ion irradiation technique

Abstract: The single electron transistor (SET) fabrication process on the individual single-walled carbon nanotubes (SWCNTs) using low energy Ar ion irradiation technique has been demonstrated. The individual SWCNT was partly irradiated through the protection resist with the two opening windows, whose width was 50 nm, fabricated by electron beam lithography. The irradiated segments had higher resistance and worked as barriers. The SWCNT-SET successfully operated up to 100 K.

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Cited by 5 publications
(6 citation statements)
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“…This technique can be applied also for the SWCNTs with reduced acceleration energy and dose [45]. Figure 17.11 shows Coulomb oscillations of one of the SETs fabricated with the method: (a) in low temperatures (below 20 K) and (b) in high temperatures (above 80 K).…”
Section: Tunnel Barrier Formationmentioning
confidence: 95%
“…This technique can be applied also for the SWCNTs with reduced acceleration energy and dose [45]. Figure 17.11 shows Coulomb oscillations of one of the SETs fabricated with the method: (a) in low temperatures (below 20 K) and (b) in high temperatures (above 80 K).…”
Section: Tunnel Barrier Formationmentioning
confidence: 95%
“…In fact, Ar ion beam irradiation of MWNTs has been used to fabricate a single electron transistor 11 and an inverter, 12 and has also been applied to SWNTs. [13][14][15][16] In general, the effects appear to be stronger for SWNTs than for MWNTs. However, the microscopic details of the effects are not understood in either case, and a key question for device fabrication is whether the method is controllable and reproducible.…”
Section: Introductionmentioning
confidence: 91%
“…The details of the fabrication procedure are given in ref. 15. The SETs fabricated by this method were successfully operated, and the temperature dependence of the Coulomb oscillations is shown in Fig.…”
Section: Barrier Formation With Ar Ion Irradiation Techniquementioning
confidence: 99%