Formation of silicon nanoparticles and web-like aggregates by femtosecond laser ablation in a background gas

Tull, Brian R.; Carey, James E.; Sheehy, Michael; Friend, Cynthia M.; Mazur, Eric

doi:10.1007/s00339-006-3502-7

Cited by 59 publications

(36 citation statements)

References 18 publications

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“…The nm-scale granular structures might have originated as particulate debris generated by laser ablation and deposited onto the silicon surface during the fs laser irradiation process. 40 41 The µm-scale conical structures in our hyperdoped black silicon were about 10 µm tall and 5±2 µm wide at the base, with variation between individual cones. The cones had an elliptical base, perhaps due to the linear polarization of the laser beam, with the base width about twice as great in one dimension as in the orthogonal dimension.…”

Section: Resultsmentioning

confidence: 84%

Simultaneous high crystallinity and sub-bandgap optical absorptance in hyperdoped black silicon using nanosecond laser annealing

Franta

Pastor

Gandhi

et al. 2015

Journal of Applied Physics

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Hyperdoped black silicon fabricated with femtosecond laser irradiation has attracted interest for applications in infrared photodetectors and intermediate band photovoltaics due to its sub-bandgap optical absorptance and light-trapping surface. However, hyperdoped black silicon typically has an amorphous and polyphasic polycrystalline surface that can interfere with carrier transport, electrical rectification, and intermediate band formation. Past studies have used thermal annealing to obtain high crystallinity in hyperdoped black silicon, but thermal annealing causes a deactivation of the sub-bandgap optical absorptance. In this study, nanosecond laser annealing is used to obtain high crystallinity and remove pressure-induced phases in hyperdoped black silicon while maintaining high sub-bandgap optical absorptance and a light-trapping surface morphology. Furthermore, it is shown that nanosecond laser annealing reactivates the sub-bandgap optical absorptance of hyperdoped black silicon after deactivation by thermal annealing. Thermal annealing and nanosecond laser annealing can be combined in sequence to fabricate hyperdoped black silicon that simultaneously shows high crystallinity, high above-bandgap and sub-bandgap absorptance, and a rectifying electrical homojunction. Such nanosecond laser annealing could potentially be applied to non-equilibrium material systems beyond hyperdoped black silicon.

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Section: Resultsmentioning

confidence: 84%

Simultaneous high crystallinity and sub-bandgap optical absorptance in hyperdoped black silicon using nanosecond laser annealing

Franta

Pastor

Gandhi

et al. 2015

Journal of Applied Physics

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show abstract

“…This regime is related to unstable boiling of superheated silicon 32,33,36 , when the nanoparticle formation occurs through explosive decomposition of the material into vapor and small clusters/droplets 33,37 , yielding nanoparticles with the mean sizes smaller than 100 nm 38 . Small silicon nanoparticles fabrication in this regime has been extensively studied over last two decades 38,39 for a number of biomedical applications. However, one can conclude that the high-fluences regime, yielding very broad size distribution (dispersion is > 100%, see Fig.…”

Section: Resultsmentioning

confidence: 99%

Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics

et al. 2016

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The concept of high refractive index subwavelength dielectric nanoresonators, supporting electric and magnetic optical resonances, is a promising platform for waveguiding, sensing, and nonlinear nanophotonic devices. However, high concentration of defects in the nanoresonators diminishes their resonant properties, which are crucially dependent on their internal losses. Therefore, it seems to be inevitable to use initially crystalline materials for fabrication of the nanoresonators. Here, we show that the fabrication of crystalline (low-loss) resonant silicon nanoparticles by femtosecond laser ablation of amorphous (high-loss) silicon thin films is possible. We apply two conceptually different approaches: recently proposed laser-induced transfer and a novel laser writing technique for largescale fabrication of the crystalline nanoparticles. The crystallinity of the fabricated nanoparticles is proven by Raman spectroscopy and electron transmission microscopy, whereas optical resonant properties of the nanoparticles are studied using dark-field optical spectroscopy and full-wave electromagnetic simulations.

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“…16 (a)). This phenomenon is similar to the formation of unusual aggregated structures composed of both crystalline and amorphous silicon nanoparticles by the femtosecond laser ablation in the presence of a background gas (Tull et al, 2006). These nanoscale web-like aggregates are expected to be evolved into Cu nanowires ( Fig.…”

Section: Morphology Control Factors Of Cu Nanoparticlementioning

confidence: 71%

“…On the other hand, top-down approaches have been developed for producing metal and semiconductor nanowires, nanobelts, and nanoprisms (Hu et al, 1999;Pan et al, 2001;Jin et al, 2001). In particular, the laser-induced ablation method has become an increasingly popular approach for making nanoparticles due to the applicability to various target materials in an ambient atmosphere (Jia et al, 2006a;Kawasaki & Masuda, 2005;Link et al, 1999;Sylvestre et al, 2004;Tamaki et al, 2002;Tull et al, 2006). Recently, various shape-controlled nanoparticles, such as nanowires (Morales & Lieber, 2008), nanotubes (Rao et al, 1997), and composite nanostructures (Zhang et al, 1998), have been fabricated by this technique.…”

Section: Introductionmentioning

confidence: 99%

Nanowire formation under femtosecond laser radiation in liquid

Miura¹,

Hirao²,

Shimotsuma³

2011

Nanowires - Fundamental Research

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Formation of silicon nanoparticles and web-like aggregates by femtosecond laser ablation in a background gas

Cited by 59 publications

References 18 publications

Simultaneous high crystallinity and sub-bandgap optical absorptance in hyperdoped black silicon using nanosecond laser annealing

Simultaneous high crystallinity and sub-bandgap optical absorptance in hyperdoped black silicon using nanosecond laser annealing

Laser fabrication of crystalline silicon nanoresonators from an amorphous film for low-loss all-dielectric nanophotonics

Nanowire formation under femtosecond laser radiation in liquid

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