Formation of PZT Thick Film Single Elements Using EHDA Deposition

Abstract

In this paper, electrohydrodynamic atomization combined with a polymeric micromoulding technique was used to form PZT single element devices using a PZT sol-gel slurry without an etching process. The PZT single element device was initially designed to work as a piezoelectric ultrasonic transducer consisting of a circular or a square of various sizes, which was produced and used to evaluate the process. The resulting PZT device had a homogenous microstructure. It was observed that the relative permittivity of the circular and square single element devices was especially high at small size due to the fringe effect. The results show that the radius and width of the PZT single circular and square element devices with a thickness of 15µm should be bigger than 400µm in order to reduce the fringe effect.

Electrohydrodynamic Atomization Deposition of Fuel Cell Catalyst-Coated Membrane with Structure and Material Gradient Variation

“…Therefore, in this work, the atomization distance for the Pt/C-C layer deposition (7 mm) is higher than that for the C and Pt/C layer deposition (3 mm). The higher working distance can produce more porous structure [17]. The same atomization conditions were applied on the anode side and the structure characteristics were similar to the cathode side, that is more porous Pt-Ru/C-C layer compared with the C and Pt-Ru/C layer (Fig.…”