1993
DOI: 10.1126/science.259.5102.1724
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Formation of Nanometer-Scale Grooves in Silicon with a Scanning Tunneling Microscope

Abstract: Grooves a few nanometers wide can be formed on a Si(111) surface with a scanning tunneling microscope when the tip is above a critical voltage. This may provide a promising approach to nanodevice fabrication. The dependence of the critical voltage on tunneling current, tip polarity, and tip material was studied with silver, gold, platinum, and tungsten tips. The results are consistent with field emission of positive and negative silicon ions. The variation of critical voltage with current is explained quantita… Show more

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Cited by 162 publications
(69 citation statements)
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References 21 publications
(16 reference statements)
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“…13) Recent progress of scanning probe technology 14,15) and computer simulation technology 16) has made these technologies almost mature enough to conquer the obstacles against the realization of single molecule devices, and the interest in single molecule device ideas has been revived over the past few years. [17][18][19][20] The aim of this paper is to review the present status of research on the use of single molecules for advanced information technologies.…”
Section: Conjugated Oligomersmentioning
confidence: 99%
“…13) Recent progress of scanning probe technology 14,15) and computer simulation technology 16) has made these technologies almost mature enough to conquer the obstacles against the realization of single molecule devices, and the interest in single molecule device ideas has been revived over the past few years. [17][18][19][20] The aim of this paper is to review the present status of research on the use of single molecules for advanced information technologies.…”
Section: Conjugated Oligomersmentioning
confidence: 99%
“…4. Grooves formed on Si(113) [21]. The width of the grooves is seen to increase with the magnitude of the voltage applied to the tip during the groove formation.…”
Section: Advanced Materialsmentioning
confidence: 93%
“…Silver is not attacked by water and atmospheric oxygen. From the viewpoint of improvements of STM performance, [10][11][12] for example, in the field of nanostructuring of surfaces, getting good tips from various materials is a matter of great importance. Although there are several reports 13,14 on the preparation of silver tips, atomic resolution is difficult to attain in topograph images using silver tips.…”
mentioning
confidence: 99%