Formation of femtosecond laser induced surface structures on silicon: Insights from numerical modeling and single pulse experiments

Derrien, Thibault J.-Y.; Torres, R.; Sarnet, T.; Sentís, M.; Itina, Tatiana E.

doi:10.1016/j.apsusc.2011.10.084

Cited by 44 publications

(27 citation statements)

References 25 publications

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“…Based on a Drude approximation of the dielectric function, this density is not sufficient to induce a strong change of the refractive index of the silica sphere. 24,25 From these graphs, an intensified electric field can also be observed inside the silicon substrate. The intensity immediately underneath the surface of silicon substrate is a few times that of the incident laser field.…”

Section: A Near Field Modellingmentioning

confidence: 85%

Laser surface micro-/nano-structuring by a simple transportable micro-sphere lens array

Sedao

Derrien²,

Römer

et al. 2012

Journal of Applied Physics

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International audienceA micro-sphere array optic was employed for laser surface micro-structuring. This array optic consists of a hexagonally close-packed monolayer of silica micro-spheres. It was organized through a self-assembly process and held together on a glass support, without using any adhesives. The array assembly was then reversed, placed in direct contact with the substrate and exposed to 515 nm, 6.7 ps laser pulses. During the exposure, the silica spheres act as micro-lenses, which enhance the near-field light intensity underneath them. As the spheres are confined in the space between the substrate and glass support, they are not ejected during laser machining. Using this type of direct write laser machining, a large number of identical features (nano-holes) can be produced in parallel simultaneously. The holes drilled are a few hundred nanometres in diameter and the depth depends on the number of laser pulses applied. The impact of laser machining on the micro-spheres was also studied. The micro-spheres were contaminated or partially damaged after micro-structuring. Combination of a moderate laser pulse energy and multiple shots was found to ensure a good surface structuring quality and minimum damage to the spherical particles. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4767471

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Section: A Near Field Modellingmentioning

confidence: 85%

Laser surface micro-/nano-structuring by a simple transportable micro-sphere lens array

Sedao

Derrien²,

Römer

et al. 2012

Journal of Applied Physics

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“…It is well known that under irradiation of linear polarized femtosecond laser pulses, in a range of fluences determined by the material properties, grating structures with spatial periodicity slightly smaller than the laser wavelength are self-organized and oriented perpendicular to the laser polarization direction [4][5][6][7][8]. Nevertheless, the physical mechanisms at the base of LIPSS formation are still highly debated in literature and many models have been proposed [9][10][11][12][13][14][15][16][17][18][19]. In this frame, a parametric decay model has been proposed by Sakabe et al [20] and, in order to confirm the validity of this model, the interspaces dependence on laser fluence for Ti, Pt, Mo, W, Si, and SiC have been measured experimentally [21][22][23].…”

Section: Introductionmentioning

confidence: 99%

Periodic surface structures on titanium self-organized upon double femtosecond pulse exposures

Gemini

Hashida

Miyasaka

et al. 2015

Applied Surface Science

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“…This interference causes periodic energy deposition [93][94][95]. In addition, an interference of the incident wave with the excited surface plasmon polaritons also leads to an enhancement of surface periodic structure formation under the conditions required for the surface plasmons [96][97][98][99][100].…”

Section: Sharp Interfacementioning

confidence: 99%

From random inhomogeneities to periodic nanostructures induced in bulk silica by ultrashort laser

2016

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Femtosecond laser-induced volume nanograting formation is numerically investigated. The developed model solves nonlinear Maxwell's equations coupled with multiple rate free carrier density equations in the presence of randomly distributed inhomogeneities in fused silica. As a result of the performed calculations, conduction band electron density is shown to form nanoplanes elongated perpendicular to the laser polarization. Two types of nanoplanes are identified. The structures of the first type have a characteristic period of the laser wavelength in glass and are attributed to the interference of the incident and the inhomogeneity-scattered light waves. Field components induced by coherent multiple scattering in directions perpendicular to the laser polarization are shown to be responsible for the formation of the second type of structures with a subwavelength periodicity. In this case, the influence of the inhomogeneity concentration on the period of nanoplanes is shown. The calculation results not only help to identify the physical origin of the self-organized nanogratings, but also explain their period and orientation.

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Formation of femtosecond laser induced surface structures on silicon: Insights from numerical modeling and single pulse experiments

Cited by 44 publications

References 25 publications

Laser surface micro-/nano-structuring by a simple transportable micro-sphere lens array

Laser surface micro-/nano-structuring by a simple transportable micro-sphere lens array

Periodic surface structures on titanium self-organized upon double femtosecond pulse exposures

From random inhomogeneities to periodic nanostructures induced in bulk silica by ultrashort laser

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