Formation mechanism of high spatial frequency laser-induced periodic surface structures and experimental support

Li, Zhixuan; Wu, Qiang; Jiang, Xiaoyu; Xu, Zuyan; Liu, Yaoyao; Hu, Xiaowen; Jian-min, Zhang; Yao, Jing; Xu, Jingjun

doi:10.1016/j.apsusc.2021.152107

Cited by 12 publications

(4 citation statements)

References 35 publications

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“…These methods are effective in detecting the periodicity, morphology, and composition of the retained HSFL; however, they cannot observe the transient process of HSFL formation. Many studies have reported that HSFL can be formed under low-fluence and multi-pulse laser irradiation but cannot be induced by a few high-fluence pulses, which makes it more complex and difficult to explain the formation of HSFL 55,56 . Moreover, although no preserved HSFL was observed after high-fluence laser irradiation, this did not mean that a transient HSFL never formed.…”

Section: Resultsmentioning

confidence: 99%

Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces

Han,

Zhang,

Jiang

et al. 2024

OES

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Femtosecond laser-induced periodic surface structures (LIPSS) have been extensively studied over the past few decades. In particular, the period and groove width of high-spatial-frequency LIPSS (HSFL) is much smaller than the diffraction limit, making it a useful method for efficient nanomanufacturing. However, compared with the low-spatial-frequency LIPSS (LSFL), the structure size of the HSFL is smaller, and it is more easily submerged. Therefore, the formation mechanism of HSFL is complex and has always been a research hotspot in this field. In this study, regular LSFL with a period of 760 nm was fabricated in advance on a silicon surface with two-beam interference using an 800 nm, 50 fs femtosecond laser. The ultrafast dynamics of HSFL formation on the silicon surface of prefabricated LSFL under single femtosecond laser pulse irradiation were observed and analyzed for the first time using collinear pump-probe imaging method. In general, the evolution of the surface structure undergoes five sequential stages: the LSFL begins to split, becomes uniform HSFL, degenerates into an irregular LSFL, undergoes secondary splitting into a weakly uniform HSFL, and evolves into an irregular LSFL or is submerged. The results indicate that the local enhancement of the submerged nanocavity, or the nanoplasma, in the prefabricated LSFL ridge led to the splitting of the LSFL, and the thermodynamic effect drove the homogenization of the splitting LSFL, which evolved into HSFL.

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Section: Resultsmentioning

confidence: 99%

Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces

Han,

Zhang,

Jiang

et al. 2024

OES

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“…The sizes of the HSFLs are 500 × 100 nm 2 , with orientation parallel to the laser polarization. The depths of the HSFLs were measured to be in the range of several tens to hundreds of nanometers [ 65 , 66 , 67 ]. In order to simplify the simulation, the ablated regions were represented by rectangular grooves with sizes of 500 × 100 × 75 nm 3 .…”

Section: Resultsmentioning

confidence: 99%

Regular Periodic Surface Structures on Indium Tin Oxide Film Efficiently Fabricated by Femtosecond Laser Direct Writing with a Cylindrical Lens

et al. 2022

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Regular laser-induced periodic surface structures (LIPSS) were efficiently fabricated on indium tin oxide (ITO) films by femtosecond laser direct writing with a cylindrical lens. It was found that randomly distributed nanoparticles and high spatial frequency LIPSSs (HSFL) formed on the surface after a small number of cumulative incident laser pulses per spot, and regular low spatial frequency LIPSSs (LSFL) appeared when more laser pulses accumulated. The mechanism of the transition was studied by real-time absorptance measurement and theoretical simulation. Results show that the interference between incident laser and surface plasmon polaritons (SPPs) excited by random surface scatterers facilitates the formation of prototype LSFLs, which in turn enhances light absorption and SPP excitation following laser pulses. The effects of scanning velocity and laser fluence on LSFL quality were discussed in detail. Moreover, large-area extremely regular LSFL with a diameter of 30 mm were efficiently fabricated on an ITO film by femtosecond laser direct writing with the cylindrical lens. The fabricated LSFLs on the ITO film demonstrate vivid structural color. During LSFL processing, the decrease of ITO film thickness leads to the increase of near-infrared optical transmittance.

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“…The phenomenon of the laser-induced periodic surface structures (LIPSSs) is commonly observed upon irradiation of the linearly polarized femtosecond laser pulses on a variety of materials, especially with the fluence nearly below the ablation threshold. − The LIPSS usually exhibits a periodic distribution of ablation lines, in which the spatial orientation strictly depends on the laser polarization, while the period is closely related to the laser wavelength and material properties. Currently, the underlying mechanisms of LIPSSs are still in debate, which include the theory of interference between the excited surface electromagnetic (EM) waves with the incident laser and the self-organization from Marangoni convective instabilities. , The interference theory is widely accepted for the origin of low-spatial-frequency LIPSSs, while the self-organization theory is generally ascribed to the formation mechanism of the high-spatial-frequency LIPSSs.…”

Section: Introductionmentioning

confidence: 99%

Homogeneous Nanostructuring of a Molybdenum Surface by Dual-Color Correlated Femtosecond Laser Irradiation for Solar Absorber Applications

Zhao,

Wang,

Yang

2023

ACS Appl. Nano Mater.

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Disordered ridge-splitting on laser-induced periodic surface structures (LIPSSs) often reduces structure quality and degrades application performance but introduces a potential route for laser structuring accuracy with access to the deep-subwavelength scale. Here, nanolithography based on the homogeneous ridge-splitting mechanism is implemented on a molybdenum surface using two-color (400 and 800 nm) temporally delayed femtosecond laser pulses with identical linear polarizations. The achieved splitting LIPSS, with a periodicity down to 140 nm and a feature size down to 70 nm, was uniformly distributed in the long range without any wavy or interruption defects, presenting improvements on the structure’s accuracy and quality relative to the observation of single-beam femtosecond 400 nm laser irradiation. The generation and suppression of the homogeneous ridge-splitting phenomenon can be manipulated via altering the time delay or the fluences of the two-color laser pulses, which results in transitions between the regular near-subwavelength and deep-subwavelength LIPSSs. The underlying physical origins are attributed to the excitation of various electromagnetic field enhancement modes during the transiently correlated dynamic process of two-color laser–material interactions. Our investigations facilitate the laser nanostructuring of metals with an accessible 100 nm feature size, and the nanostructured Mo surface enables specific applications in the field of concentrated solar energy devices.

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Formation mechanism of high spatial frequency laser-induced periodic surface structures and experimental support

Cited by 12 publications

References 35 publications

Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces

Ultrafast dynamics of femtosecond laser-induced high spatial frequency periodic structures on silicon surfaces

Regular Periodic Surface Structures on Indium Tin Oxide Film Efficiently Fabricated by Femtosecond Laser Direct Writing with a Cylindrical Lens

Homogeneous Nanostructuring of a Molybdenum Surface by Dual-Color Correlated Femtosecond Laser Irradiation for Solar Absorber Applications

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