2017
DOI: 10.1088/1742-6596/857/1/012036
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Formation and investigation of thin MoS2 films for electronics

Abstract: Abstract. The article is devoted to obtaining and studying of films of molybdenum disulfide for applications in electronics. The paper presents the results of processing images obtained using optical and atomic force microscopy of films deposited by magnetron sputtering. The structure of the substrate has shown significant influence on structure of film of MoS 2 .

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References 15 publications
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