Force-balancing force sensor with an optical lever

Kato, Nobuhiro; Suzuki, Itsuko S.; Kikuta, Hisao; Iwata, Koichi

doi:10.1063/1.1146080

Cited by 17 publications

(7 citation statements)

References 9 publications

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“…For the high Q resonance system, the feedback controller must have a very fast response, that is, the feedback gain must be secured for an extremely high frequency. A narrow bandwidth of the feedback controller will cause instability of the feedback system 18 . The bandwidth required to stabilize the system is roughly proportional to the feedback gain and the Q of the cantilever.…”

Section: Introductionmentioning

confidence: 99%

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Fabrication of polymer cantilevers for force-controlled atomic force microscope

Kato

Park

Matsumoto

et al. 2003

Lithographic and Micromachining Techniques for Optical Component Fabrication II

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I SUMMARY 3The focus of the research effort in the Precision Engineering Center is to improve the capability of precision manufacturing process. This focus requires research into new sensors and measurement techniques for surface characterization, in-depth studies of fabrication techniques, and hardware and software solutions for enhanced machine control. The projects have been written as separate Sections but the interaction between projects is the strength of this organization. The multidisciplinary viewpoint provided by this unique group of faculty and students with their different backgrounds and experiences is the essence of the Precision Engineering Center. The product of the Center is new technology as well as a new cadre of researchers. The students involved in the Center, described in the back of this report, are of the highest quality. The project summaries are arranged under three broad categories: 3 * Measurement and Motion-Fabrication Techniques I •Machine Control. 3 MEASUREMENT AND MOTION The emphasis in these projects has been to develop techniques that can be used to characterize fabricated surfaces at nanometer resolution as well as to study drive systems that have the potential for nanometer positioning resolution. Atomic Force Microscopy-The AFM has become an increasingly popular tool for material characterization. It allows the imaging of a surface with a resolution as high as the atomic limit. However, the interpretation of the images is influenced by the parameters of the microscope and the tip. For example, the choice of imaging mode-constant force height or differential force mapping-may have a significant impact on the resulting image as will the relative radius of the tip and the surface features. I I.

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Section: Introductionmentioning

confidence: 99%

“…Deflection of the cantilever is detected by a sensor, and its output is fed back to a force actuator. The actuator generates electrostatic 6,[15][16][17][18][19][20] or magnetic [21][22][23][24][25] force to compensate the deflection of the cantilever. The input signal to the actuator is detected as the measured force.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of polymer cantilevers for force-controlled atomic force microscope

Kato

Park

Matsumoto

et al. 2003

Lithographic and Micromachining Techniques for Optical Component Fabrication II

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“…The possible techniques have utilized the electrostatic force [5][6][7][8][9] or magnetic force. 10,11 Although, the electrostatic force technique has been used successfully, there are various problems: It is not operable in liquid and required a fairly large area in order to produce strong forces.…”

Section: Introductionmentioning

confidence: 99%

Precise force curves in air and liquid by magnetic force feedback

Yamamoto¹,

Yamada²,

Tokumoto³

1997

Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

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Articles you may be interested inOn eigenmodes, stiffness, and sensitivity of atomic force microscope cantilevers in air versus liquids A simple modification of a commercial atomic force microscopy liquid cell for in situ imaging in organic, reactive, or air sensitive environments Rev.We developed an atomic force microscopy with the tip position was accurately controlled through the magnetic interaction between a coil and the magnet fixed behind the cantilever. By incorporating a feedback system, we could control the motion of a soft cantilever ͑0.68 N/m͒ in air and liquid, and obtain force curves without instabilities originating from the strong attractive and adhesive forces between the tip and the sample.

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“…However, in order to enhance the lever stiffness it is essential to control the lever at its resonant frequency. Few papers provide sufficient information to evaluate the effect of their feedback at resonance, with the exception of Kato et al [11] who provide figures showing that with their system the feedback does not shift the resonant frequency and hence there is no increase in the effective stiffness of their system with the feedback active, although they do observe significant noise damping below 150 Hz. Unfortunately, the net effect of their feedback is to drive the lever at resonance, contrary to stability requirements.…”

mentioning

confidence: 96%

“…This has indeed been implemented in probe microscopy using both electrostatic forces (e.g. [8][9][10][11][12]) and magnetic forces [4,13].…”

mentioning

confidence: 98%