Focussing over the edge: adaptive subsurface laser fabrication up to the sample face

Salter, Patrick S.; Booth, M. J.

doi:10.1364/oe.20.019978

Cited by 17 publications

(13 citation statements)

References 21 publications

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“…A number of groups have used SLMs to focus the incident energy to a multitude of foci. [ 63 ] Copyright 2012, Optical Society of America. [ 73 ] While diffraction limited resolution is, in principle, possible ( Reproduced with permission.…”

Section: Progress Reportmentioning

confidence: 99%

Three‐Dimensional μ‐Printing: An Enabling Technology

Hohmann

Renner

Waller

et al. 2015

Advanced Optical Materials

150

102

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functional elements, chiral photonic crystals, photonic metamaterials and quasicrystals. With this technology becoming commercially available, [ 1 ] many novel ideas have been realized by scientists around the world. Some of these developments can already be seen as new research areas enabled by 3D µ-printing.Many excellent reviews of the underlying technology have recently been published, and we give here just a short selection. [2][3][4][5] With the present progress report we want to summarize the tremendous technological development during the last fi ve years as well as to give an overview over some vastly growing research fi elds enabled by this development. As the number of research papers based on 3D µ-printing as enabling technology is exploding, we intend to categorize the most recent developments to identify future research directions and possible novel fi elds for the years to come. Recent Technological Advances in 3D µ-PrintingFrom the fi rst proof-of-principle in 1997, [ 6 ] the µ-printing community has continuously been expanding the structuring capabilities of µ-printing systems overcoming limitations such as structuring speed, sample volume, complicated pre and post processing, as well as minimum feature size and resolution. Progress is made along two directions: First, extending the aforementioned benchmarks of µ-printing systems. Second, techniques that move µ-printed structures towards functional devices. These two directions obviously are intertwined and require interdisciplinary research efforts on new photocurable materials, complex light-matter interaction, reaction kinetics as well as processes on a molecular level infl uencing structure formation. The most infl uential technological advances are summarized in this section.Section 2.1. covers recent work leading to a tremendous increase of the capabilities of µ-printing systems. Section 2.2. describes superresolution concepts exploiting light-matter interactions to achieve smaller feature sizes and higher structural resolution. Section 2.3. reviews spatial light modulator (SLM) based laser lithography providing additional degrees of freedom by shaping the wavefront of the laser beam. Laser Sources, Scanning Devices, and Writing GeometryThe high complexity of ultrafast fs-lasers drives the community to look for alternative laser sources, leading to cost and In this progress report the development of three-dimensional µ-printing and its impact as an enabling technology onto different scientifi c fi elds is reviewed. Driven by direct laser writing via two-photon absorption, the technology has reached a level of maturity and ease of application such that 3D printing on the micrometer scale can now be considered. While the underlying technology is still developing towards higher resolution and increasing speed of fabrication, the last fi ve years have seen new fi elds rising that were obviously enabled by 3D µ-printing. Among the recent technological developments discussed in this progress report are the fi elds of super-resolution lithography ...

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Section: Progress Reportmentioning

confidence: 99%

Three‐Dimensional μ‐Printing: An Enabling Technology

Hohmann

Renner

Waller

et al. 2015

Advanced Optical Materials

150

102

View full text Add to dashboard Cite

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“…It has been shown that phase aberrations may be compensated using adaptive optics elements (AOEs), such as liquid crystal spatial light modulators or deformable mirrors, either in microscopy [18,19], or laser fabrication systems [20][21][22][23][24]. However, until now, there has been no systematic analysis for the effects of aberrations in SSTF.…”

Section: Introductionmentioning

confidence: 99%

Effects of aberrations in spatiotemporal focusing of ultrashort laser pulses

2014

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Spatiotemporal focusing, or simultaneous spatial and temporal focusing (SSTF), has already been adopted for various applications in microscopy, photoactivation for biological studies, and laser fabrication. We investigate the effects of aberrations on focus formation in SSTF, in particular, the effects of phase aberrations related to low-order Zernike modes and a refractive index mismatch between the immersion medium and sample. By considering a line focus, we are able to draw direct comparison between the performance of SSTF and conventional spatial focusing (SF). Wide-field SSTF is also investigated and is found to be much more robust to aberrations than either line SSTF or SF. These results show the sensitivity of certain focusing methods to specific aberrations, and can inform on the necessity and benefit of aberration correction.

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“…This is also compatible with further aberration correction, such as that encountered near the edge of the substrate to remove the need for timeconsuming polishing steps. 21 Additionally, holograms may be displayed on the SLM in order to create a focal array that may fabricate waveguides with arbitrary cross-sections in a single pass of the sample. Experimental feedback is necessary during the hologram design to achieve the required uniformity in intensity for the focal array.…”

Section: Discussionmentioning

confidence: 99%

Dynamic optical methods for direct laser written waveguides

Salter

Booth

2013

SPIE Proceedings

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Direct laser writing is widely used to fabricate 3D waveguide devices by modification of a materials refractive index. The fabrication fidelity depends strongly on focal spot quality, which in many cases is impaired by aberrations, particularly spherical aberration caused by refractive index mismatch. We use adaptive optics to correct aberration and maintain fabrication performance at a range of depths. Adaptive multifocus methods are also shown for increasing the fabrication speed for single waveguides.

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Focussing over the edge: adaptive subsurface laser fabrication up to the sample face

Cited by 17 publications

References 21 publications

Three‐Dimensional μ‐Printing: An Enabling Technology

Three‐Dimensional μ‐Printing: An Enabling Technology

Effects of aberrations in spatiotemporal focusing of ultrashort laser pulses

Dynamic optical methods for direct laser written waveguides

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