2013
DOI: 10.1117/12.2005054
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Dynamic optical methods for direct laser written waveguides

Abstract: Direct laser writing is widely used to fabricate 3D waveguide devices by modification of a materials refractive index. The fabrication fidelity depends strongly on focal spot quality, which in many cases is impaired by aberrations, particularly spherical aberration caused by refractive index mismatch. We use adaptive optics to correct aberration and maintain fabrication performance at a range of depths. Adaptive multifocus methods are also shown for increasing the fabrication speed for single waveguides.

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Cited by 5 publications
(4 citation statements)
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“…We therefore introduced a further stage to optimize the hologram. Stage 2 of the algorithm updates the phase pattern based on the experimental measurement of two-photon fluorescence from each focus [40,41]. We also introduced an intensity factor, Q m , which allows a different target intensity for each spot.…”
Section: Hologram Designmentioning
confidence: 99%
“…We therefore introduced a further stage to optimize the hologram. Stage 2 of the algorithm updates the phase pattern based on the experimental measurement of two-photon fluorescence from each focus [40,41]. We also introduced an intensity factor, Q m , which allows a different target intensity for each spot.…”
Section: Hologram Designmentioning
confidence: 99%
“…This would aid quality control during fabrication, allowing monitoring to ensure uniformity of the waveguides throughout the chip. This is particularly important when manufacturing three dimensional photonic circuits as depth dependent aberrations can affect the focal intensity distribution of the fabrication beam [20][21][22]. It would also enable online adjustment of the fabrication procedure to ensure that the waveguide network may display cer- tain desired properties.…”
Section: Live Acquisition Of Phase Profiles During Fabricationmentioning
confidence: 99%
“…Using a computer-generated hologram, multiple foci can be positioned in three dimensions [92,93]. This enables the single-sweep writing of several waveguides [94][95][96][97] or the inscription of multiscan waveguides in a single pass [98].…”
Section: Spherical Aberrationsmentioning
confidence: 99%