Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components

Picard, Yoosuf N.; Adams, D. P.; Vasile, M. J.; Ritchey, M.B

doi:10.1016/s0141-6359(02)00188-5

Cited by 109 publications

(65 citation statements)

References 25 publications

(30 reference statements)

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“…For the purpose of concision, the four types of multi-tip tools are generally labeled as T1, T2, T3, and T4 in this paper. All of the tool models built here are based on a deformable body with 4 a round cutting edge radius r of 5a (a = 3.567 Å), a tool rake angle α of 0º , and a tool clearance angle β of 10º (as shown in Fig. 1 (e)).…”

Section: Geometric Models For MD Simulationsmentioning

confidence: 99%

“…Diamond turning using multi-tip single crystal diamond tools, as a new machining technique, shows powerful capacity in the fabrication of micro/nano structures [4][5][6][7]. In recent decades, various kinds of micro multi-tip tools (with tool tip dimensions ranging from 15 µm to 100 µm) fabricated by the FIB milling technique were successfully applied to form well-ordered micro grooves [4][5], arrays [6], and diffraction gratings [7].…”

Section: Introductionmentioning

confidence: 99%

“…In recent decades, various kinds of micro multi-tip tools (with tool tip dimensions ranging from 15 µm to 100 µm) fabricated by the FIB milling technique were successfully applied to form well-ordered micro grooves [4][5], arrays [6], and diffraction gratings [7]. Recently nano-gratings with the pitch as lower as 150 nm were fabricated using a nanoscale multi-tip diamond tool through the diamond turning operations [8].…”

Section: Introductionmentioning

confidence: 99%

“…As the nanostructures are formed synchronously within a single cutting pass, the interactions of the deformed layers created by each tool tip might alter the material removal mechanism [9] and result in unpredictable processing defects. Although a few reports can be found in the literature preliminarily describing the high form accuracy and throughput of this technique [4][5][6][7][8], no experimental or theoretical research work has been found which investigated the dependence of 3 the form accuracy of machined nanostructures on the tool geometrical parameters. The characterization of the shape transferability of this technique is needed before the standardization and commercialization of nanocale multi-tip diamond tools.…”

Section: Introductionmentioning

confidence: 99%

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Investigation of the shape transferability of nanoscale multi-tip diamond tools in the diamond turning of nanostructures

Luo

Tong

Liang

2014

Applied Surface Science

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In this paper, the shape transferability of using nanoscale multi-tip diamond tools in the diamond turning for scale-up manufacturing of nanostructures has been demonstrated. Atomistic multi-tip diamond tool models were built with different tool geometries in terms of the difference in the tip cross-sectional shape, tip angle, and the feature of tool tip configuration, to determine their effect on the applied forces and the machined nano-groove geometries. The quality of machined nanostructures was characterized by the thickness of the deformed layers and the dimensional accuracy achieved. Simulation results show that diamond turning using nanoscale multi-tip tools offers tremendously shape transferability in machining nanostructures. Both periodic and non-periodic nano-grooves with different cross-sectional shapes can be successfully fabricated using the multi-tip tools. A hypothesis of minimum designed ratio of tool tip distance to tip base width (L/Wf) of the nanoscale multi-tip diamond tool for the high precision machining of nanostructures was proposed based on the analytical study of the quality of the nanostructures fabricated using different types of the multi-tip tools. Nanometric cutting trials using nanoscale multi-tip diamond tools (different in L/Wf) fabricated by focused ion beam (FIB) were then conducted to verify the hypothesis. The investigations done in this work imply the potential of using the nanoscale multi-tip diamond tool for the deterministic fabrication of period and non-periodic nanostructures, which opens up the feasibility of using the process as a versatile manufacturing technique in nanotechnology.

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Section: Geometric Models For MD Simulationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Investigation of the shape transferability of nanoscale multi-tip diamond tools in the diamond turning of nanostructures

Luo

Tong

Liang

2014

Applied Surface Science

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“…Micro tools were fabricated by precision mechanical grinding wheels and micro-electrodischarge machining (μ-EDM) [61], or FIB system [62,63]. Bhavsar reviewed micro-tools fabricated using FIB milling process, and suggested a novel tool design with four cutting edges [64].…”

mentioning

confidence: 99%

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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The aim of this work was to develop a novel hybrid manufacturing method for nanoscale three-dimensional (3D) printing with multi-material capabilities. 3D structuring methods at the micro/nanoscale are major goals of various engineering fields, and much work has been carried out to improve the minimum feature size, geometrical complexity, and material selection. With the aim of nanoscale multimaterial printing, a hybrid process was reported with an integrated nanoparticle deposition system (NPDS) and focused ion beam (FIB) system; however this process has limitations in terms of surface roughness and control over the layer thickness, as well as with the process scale, and furthermore, lack of sacrificial layers.In this dissertation, a novel hybrid process is described, which combines aerodynamically focused nanoparticle (AFN) printing, micro-machining and focused ion beam (FIB) milling. AFN printing is based on NPDS, and micromachining was used for local planarization. In addition to these processes, spincoating was used to fabricate sacrificial layers. By bridging these different II micro/nanoscale processes, the resulting hybrid process can address the limitations of the individual processes.To create the hybrid process, each process was investigated to enable compatibility. With the AFN printing system, the surface morphology of a detached substrate was observed, and the bonding mechanism between the substrate and nanoparticles was investigated. A novel printing strategy was identified to reduce the scale of the process. With the micro-machining system, different tool geometries were investigated. Complex geometries inspired by conventional-scale tools were implemented on the micro-scale, and their effects were investigated. With the FIB system, material re-deposition phenomena were investigated to reduce defects that occur during ion sputtering. A novel path-generation strategy was identified and investigated for different scanning paths.Process capability is discussed using fabrication examples and functional applications. The novel hybrid process represents a significant advance in the state of the art, and enables far improved process scales or dimensional degree of freedom, without losing the advantages of broad choice of materials.3D-pinted micro bi-material cantilevers were fabricated as a thermal actuator.The mechanical and thermal properties of the structure were investigated using an in-situ measurement system, and irregular thermal phenomena were analyzed. It is expected that these in-situ measurements of the 3D printed microstructure will contribute to materials research.Various 3D structures can be fabricated using the process described here from a range of metal/ceramic inorganic materials, including polymers. In particular, it is expected that the process will contribute to the area of customized nanoscale structuring, with potential applications in medical treatments. It is also expected that this work will contribute to further improvements in manufacturing technology by combining different m...

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Diamond Turning and Micro Turning

Huo

Cheng

2013

Micro‐Cutting

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Focused ion beam-shaped microtools for ultra-precision machining of cylindrical components

Cited by 109 publications

References 25 publications

Investigation of the shape transferability of nanoscale multi-tip diamond tools in the diamond turning of nanostructures

Investigation of the shape transferability of nanoscale multi-tip diamond tools in the diamond turning of nanostructures

Hybrid 3D printing by bridging micro/nano processes

Diamond Turning and Micro Turning

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