Investigation of the shape transferability of nanoscale multi-tip diamond tools in the diamond turning of nanostructures

Abstract

In this paper, the shape transferability of using nanoscale multi-tip diamond tools in the diamond turning for scale-up manufacturing of nanostructures has been demonstrated. Atomistic multi-tip diamond tool models were built with different tool geometries in terms of the difference in the tip cross-sectional shape, tip angle, and the feature of tool tip configuration, to determine their effect on the applied forces and the machined nano-groove geometries. The quality of machined nanostructures was characterized by the thickness of the deformed layers and the dimensional accuracy achieved. Simulation results show that diamond turning using nanoscale multi-tip tools offers tremendously shape transferability in machining nanostructures. Both periodic and non-periodic nano-grooves with different cross-sectional shapes can be successfully fabricated using the multi-tip tools. A hypothesis of minimum designed ratio of tool tip distance to tip base width (L/Wf) of the nanoscale multi-tip diamond tool for the high precision machining of nanostructures was proposed based on the analytical study of the quality of the nanostructures fabricated using different types of the multi-tip tools. Nanometric cutting trials using nanoscale multi-tip diamond tools (different in L/Wf) fabricated by focused ion beam (FIB) were then conducted to verify the hypothesis. The investigations done in this work imply the potential of using the nanoscale multi-tip diamond tool for the deterministic fabrication of period and non-periodic nanostructures, which opens up the feasibility of using the process as a versatile manufacturing technique in nanotechnology.

Investigation of a scale-up manufacturing approach for nanostructures by using a nanoscale multi-tip diamond tool

“…Visible material bulge between the machined nano-grooves was found when a depth of cut of 2.5 nm was used ( figure 8 (b)), which mainly due to the overlap effect of the multi-tip tool cutting [8]. However, with further increase of the depth of cut, the height of bulge reduced and it disappeared when a depth of cut of 3.5 nm In principle, a small depth of cut is a necessary condition of improving the machining precision [24].…”

“…Periodic micro grooves [4], arrays [5], and diffraction gratings [6] have been successfully obtained by using micro multi-tip tools fabricated by FIB (with tool tip dimensions ranging from 15 µm to 100 µm). Recently, nano-gratings with pitch of 150 nm can be generated by this technique when using nanoscale multi-tip diamond tools [7,8]. Owing to the unprecedented merits of high throughput, one-step, and highly flexible precision capabilities, diamond turning using nanoscale multi-tip diamond tools has led to the hope for breaking the technical bottleneck for scale-up manufacturing of nanostructures.…”

Molecular Dynamics (MD) Simulation of Multi-pass Nanometric Machining - The Effect of Machining Conditions

“…Recently, Tong et al [10] and Luo et al [11] studied the mechanism of machining nanostructures by using single tip and multi-tip diamond tools. The MD simulations were conducted on diamond tools and copper workpiece.…”

Investigation of focused ion beam induced damage in single crystal diamond tools

“…This approach therefore, fully utilises the fine process capability of the physical sputtering actions of FIB and the high productivity of diamond turning. Most recently, nano-gratings with the pitch as small as hundreds of nanometres can also be generated by this technique using nanoscale multi-tip diamond tools [13,14].…”