Focused ion beam milling of diamond: Effects of H2O on yield, surface morphology and microstructure

Adams, David P.; Vasile, M. J.; Mayer, T. M.; Hodges, V. Carter

doi:10.1116/1.1619421

Cited by 95 publications

(85 citation statements)

References 47 publications

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“…This erodes a surface at different rates depending on the slope of the surface, so intricate two-dimensional structures can emerge. Currently, focused ion beam bombardment is used to micromachine tall, steep features 5,6 , and to sculpt nanopore single-biomolecule detectors 7,8 , while uniform ion bombardment of a flat surface is used to create semiconductor quantum dots from the linear instabilities that are excited [9][10][11] . The utility of these techniques is, however, limited.…”

Section: Introductionmentioning

confidence: 99%

Creating sharp features by colliding shocks on uniformly irradiated surfaces

Holmes-Cerfon¹,

Aziz²,

Brenner³

2012

Phys. Rev. B

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Using a theoretical analysis of the ion beam sputtering dynamics, we demonstrate how ion bombardment on an initially sloped surface can create knife-edge-like ridges on the surface. These ridges arise as nonclassical shock-like solutions that are undercompressive on both sides, and appear to control the dynamics over a large range of initial conditions. The slope of the ridges is selected uniquely by the dynamics, and can be up to 30 or more depending on the orientation dependence of the sputtering yield. For 1keV Ar + on Si(001), the scale of the ridge is ≈ 2nm. This is much smaller than the most unstable lengthscale and suggests a method for creating very steep, very sharp features on a surface spontaneously, by pre-patterning the surface to contain relatively modest slopes on the macroscale.

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Section: Introductionmentioning

confidence: 99%

Creating sharp features by colliding shocks on uniformly irradiated surfaces

Holmes-Cerfon¹,

Aziz²,

Brenner³

2012

Phys. Rev. B

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“…Yield (atoms off per ion in) drops throughout with the final average yield = 3.4. Reference yields for this angle are 4 [9], but quantifying yield vs. aspect indicates the early stage (aspect <0.1) has yield as high as 5 [7]. Fig.…”

Section: Experimental Procedures and Resultsmentioning

confidence: 99%

“…Starting from an atomically flat surface such as single crystal Si or diamond, ripples must grow. Ripples on diamond grow, depend on angle [9], and have been reported to saturate [10]. Redeposition can help ripples grow [8].…”

Section: Introductionmentioning

confidence: 99%

“…Ripples can develop independent of whether a big static ion beam or a Focused Ion Beam is used [3][4][5][6][7]. The scan direction of the FIB can be irrelevant to the ripple orientation [4][5][6][7][8][9], with a caveat that the scan pattern is a wellcontrolled, overlapping-digital pattern. Even boundary conditions can be the same for FIB or static beams [4][5][6], however FIB generally creates 3-D geometries, and boundary conditions such as aspect ratio are paramount to FIB processing [7][8].…”

Section: Introductionmentioning

confidence: 99%

“…Modulations can depend on many parameters [2][3][4][5][6][7][8][9][10]: intrinsic to the ion beam (eV, angle, species, dose); intrinsic to the sample (species, crystallography, grain orientations, boundary conditions such as pre-patterned 3-dimensional geometries [4][5][6] or interfaces and crater sidewalls [7][8]11]); and/or extrinsic (temperature, chemical enhancers). Ripples can develop independent of whether a big static ion beam or a Focused Ion Beam is used [3][4][5][6][7].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Ion Beam Induced Surface Modulations from Nano to Pico: Optimizing Deposition During Erosion and Erosion During Deposition

MoberlyChan

Schalek

2007

MRS Proc.

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Ion beams of sufficient energy to erode a surface can lead to surface modulations that depend on the ion beam, the material surface it impinges, and extrinsic parameters such as temperature and geometric boundary conditions. Focused Ion Beam technology both enables site-specific placement of these modulations and expedites research through fast, high dose and small efficient use of material. The DualBeam (FIB/SEM) enables in situ metrology, with movies observing ripple formation, wave motion, and the influence of line defects. Nanostructures (ripples of >400nm wavelength to dots spaced <40nm) naturally grow from atomically flat surfaces during erosion, however, a steady state size may or may not be achieved as a consequence of numerous controlled parameters: temperature, angle, energy, crystallography. Geometric factors, which can be easily invoked using a FIB, enable a controlled component of deposition (and/or redeposition) to occur during erosion, and conversely allow a component of etching to be incurred during (ion-beam assisted) deposition. High angles of ion beam inclination commonly lead to "rougher" surfaces, however, the extreme case of 90.0° etching enables deposition of organized structures 1000 times smaller than the aforementioned, video-recorded nanostructures. Orientation and position of these picostructures (naturally quantized by their atomic spacings) may be controlled by the same parameters as for nanostructures (e.g. ion inclination and imposed boundary conditions, which are flexibly regulated by FIB). Judicious control of angles during FIB-CVD growth stimulates erosion with directionality that produces surface modulations akin to those observed for sputtering. Just as a diamond surface roughens from 1-D ripples to 2-D steps with increasing angle of ion sputtering, so do ripples and steps appear on carbon-grown surfaces with increase in angle of FIB-CVD. Ion beam processing has been a stalwart of the microelectronics industry, is now a vital tool for research of self-organizing nanostructures, and promises to be a focus for future picotechnology.

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Fundamentals of the Focused Ion Beam System

Yao

2012

Handbook of Nanoscopy

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Focused ion beam milling of diamond: Effects of H2O on yield, surface morphology and microstructure

Cited by 95 publications

References 47 publications

Creating sharp features by colliding shocks on uniformly irradiated surfaces

Creating sharp features by colliding shocks on uniformly irradiated surfaces

Ion Beam Induced Surface Modulations from Nano to Pico: Optimizing Deposition During Erosion and Erosion During Deposition

Fundamentals of the Focused Ion Beam System

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