“…Microlens arrays (MLAs) have been proven to be important and irreplaceable optical devices due to their capability of integration, small volume, low cost, and distinctive optical performance in expanding the number of applications in microfabrication [1,2], 3D displays [3], beam shaping [4,5], and integrated optofluidic microchips [6]. Various methods have been proposed for fabrication of MLAs, such as laser direct writing (LDW) [7,8], thermal photoresist reflow [9], droplet inkjet [10], grayscale lithography [11], and multi-beam interference [12]. However, these methods are suitable only for soft materials, which limits the usage of MLAs in extreme environments.…”