Fluorine in low-pressure chemical vapor deposited W/Si contact structures: Inclusion and thermal stability

Abstract

Stability of the dimer structure formed on Si(100) by ultraclean lowpressure chemicalvapor deposition Recrystallization by rapid thermal annealing of implanted lowpressure chemicalvapordeposited amorphous Si films J. Appl. Phys. 62, 4878 (1987); 10.1063/1.338994Observations on the phase transformation and its effect on the resistivity of WSi2 films prepared by lowpressure chemical vapor deposition

A new global analysis of deep inelastic scattering data

“…In the first step, the bin centre correction and the radiative corrections are determined independently: the former by a parametrisation obtained in two different ways (see below); the latter by a standard fit (we use the LO GRV pdf's [21]). Then, we perform a LO QCD fit to the corrected CDHSW cross sections, to the CDHS data and to the BCDMS, NMC and SLAC [41] structure functions 4 . Using the pdf's of this fit we re-evaluate the full correction factor of eq.…”

“…Target mass corrections [72] are also very small but have been taken into account in our calculations. Due to the W 2 and Q 2 cuts neither the E665 [73], nor the H1 (1995) [74], nor the SLAC [41], nor the ZEUS (1995) F 2 data [75] enter our fits.…”

The QCD renormalization scale stability of high twists and αs in deep inelastic scattering

“…In the analysis of Ref. [3] we used combined SLAC-BCDMS-NMC proton-deuterium data [7] with the cuts x ≥ 0.3 to reduce QCD evolution to the nonsinglet case and x ≤ 0.75 to reject the region where a nuclear effects in deuterium can be significant. The initial scale of evolution was chosen equal to Q 2 0 = 9 GeV 2 to provide comparability with the earlier results of Ref.…”

Analysis of deep inelastic scattering with z-dependent scale

“…As in the non-singlet case, we can combine eqs. (12,15) and the evolution of the gluon into a 'one-step' evolution of the singlet structure function [7] correct to O(α 2 S ) which is of the form…”

“…As with the usual analysis of DIS structure functions, the parton distribution functions (pdf's) are parametrised at some starting scale, Q 2 0 , but now evolved according to eqs. (7,15,19). In the recent MRST fits [9], the starting scale is Q 2 0 = 1 GeV 2 and the gluon at small x is suppressed (so-called 'valence-like' gluon) at this Q 2 in order to describe the relatively small slope dF 2 /d ln Q 2 of the structure function observed at HERA [10,11] at low x and low Q 2 .…”