2020
DOI: 10.3390/membranes10100300
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Fluid-Structure Interaction Analysis on Membrane Behavior of a Microfluidic Passive Valve

Abstract: In this paper, the effect of membrane features on flow characteristics in the microfluidic passive valve (MPV) and the membrane behavior against fluid flow are studied using the fluid-structure interaction (FSI) analysis. Firstly, the microvalve model with different numbers of microholes and pitches of microholes are designed to investigate the flow rate of the MPV. The result shows that the number of microholes on the membrane has a significant impact on the flow rate of the MPV, while the pitch of microholes… Show more

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Cited by 9 publications
(7 citation statements)
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“…Moreover, many researchers are actively engaged in the development of important experimental research works for the development and prototyping of special MEMS such as, for example, circular graphene membrane MEMS devices [ 43 , 44 ], SiN circular membrane MEMS devices [ 45 , 46 ], and CMOS MEMS-based membrane-bridge devices [ 47 ] particularly useful for industrial applications. Moreover, the scientific community is intensively working on the analysis/synthesis of multi-physical models characterized by a high degree of symmetry, because these are more easily achievable from a technological point of view [ 24 , 30 , 48 , 49 , 50 , 51 ]. Accordingly, we have focused our attention on a 2 D circular membrane MEMS device, a kind of geometry widely used in many industrial applications [ 24 , 25 , 48 , 52 ].…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, many researchers are actively engaged in the development of important experimental research works for the development and prototyping of special MEMS such as, for example, circular graphene membrane MEMS devices [ 43 , 44 ], SiN circular membrane MEMS devices [ 45 , 46 ], and CMOS MEMS-based membrane-bridge devices [ 47 ] particularly useful for industrial applications. Moreover, the scientific community is intensively working on the analysis/synthesis of multi-physical models characterized by a high degree of symmetry, because these are more easily achievable from a technological point of view [ 24 , 30 , 48 , 49 , 50 , 51 ]. Accordingly, we have focused our attention on a 2 D circular membrane MEMS device, a kind of geometry widely used in many industrial applications [ 24 , 25 , 48 , 52 ].…”
Section: Introductionmentioning
confidence: 99%
“…The design of the passive microfluidic devices described in the previous sections required two-dimensional (2D) or 3D FEM simulations of fluid flows fully coupled with structures undergoing large deformation, nonlinear material response, and contact conditions [58][59][60][61][62][63]. The non-well-defined Young's Modulus of some elastomeric materials (e.g., PDMS), coupled with the difficult adaptative meshing of high aspect ratio structures, are a challenge in computational engineering.…”
Section: Spring Valve With a Spiral Groove On A Moving Pistonmentioning
confidence: 99%
“…The elastic membrane has two orifices. Later, Lin et al [ 43 ] optimized the structure of this valve, and studied the effect of different numbers of holes on constant flow. The purpose of the above research is to realize that the outlet flow rate remains constant when the inlet pressure reaches a certain threshold.…”
Section: Introductionmentioning
confidence: 99%