Flow Control by Magnetic Fields during Crystal Growth from Melt

Vizman, Daniel

doi:10.1016/b978-0-444-63303-3.00023-7

Cited by 9 publications

(7 citation statements)

References 170 publications

(152 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Note that, for both of these cases, the shape of the interface contacting the crucible wall is not affected by melt convection, rather its shape is primarily determined by the mismatch in thermal conductivities between solid, melt, and crucible, as explained in the classical analysis of Jasinski and Witt[67]. See also the discussion in[8] 4. An interface shape that is convex with respect to the crystal has been postulated to minimize the potential for defects that may arise from deleterious ampoule wall interactions, such as dislocations, grains, or twins, to propagate toward the bulk crystal[8,68,69].…”

mentioning

confidence: 82%

“…accumulation of thermal energy per unit volume convective transport of thermal energy through unit volume conductive transport of thermal energy through unit volume (4) where C p is the heat capacity and κ is the thermal conductivity of the fluid. A more extensive discussion of heat transfer in melt crystal growth is provided in [8].…”

Section: Convection-the Effects Of Fluid Flowmentioning

confidence: 99%

“…The application of an external magnetic field over an electrically conducting melt has long been of interest in crystal growth. The Lorentz forces that are produced under such fields can alter the form and strength of underlying flows; see, e.g., the recent review by Vizman [4]. Here, we are interested in a particular form for the magnetic field, in which an alternating current is phased through individual coils surrounding an crucible to produce a time-dependent, traveling magnetic field (TMF).…”

Section: Modifying Interface Shape In Melt Growth Via a Traveling Magmentioning

confidence: 99%

“…The quartz crucible does not shield the melt from the magnetic field as much as the electrically-conducting graphite crucible, so the strengthening of the vortex near the interface is even greater, convecting more heat toward the interface and driving it further downward while making it more convex. 3 This is an example of a "good" flow driven by an applied field that provides an improved (convex) interface shape 4 .…”

Section: Modifying Interface Shape In Melt Growth Via a Traveling Magmentioning

confidence: 99%

“…The literature on flows in crystal growth is vast, and no attempt will be made to present a comprehensive summary of it. Some recent reviews on this topic include those of Derby et al [1], Kakimoto and Gao [2], Tsukada [3], Vizman [4], and Capper and Zharikov [5]. In this chapter, we will first focus on some essentials on flows and their effects, followed by a series of examples of interesting and important flows in crystal growth systems.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Fluid dynamics in crystal growth: The good, the bad, and the ugly

Derby

2016

Progress in Crystal Growth and Characterization of Materials

View full text Add to dashboard Cite

Fluid dynamics are important in processes that grow large crystals from a liquid phase. This chapter presents a primer on fluid mechanics and convection, followed by a discussion of the physics and scaling of flows in such processes. Specific examples of fluid flows in crystal growth systems are presented and classified according to their impact on outcomes, good or bad. Turbulence in crystal growth is discussed within the limited extent of our understanding, which is incomplete, or ugly.

show abstract

mentioning

confidence: 82%

Section: Convection-the Effects Of Fluid Flowmentioning

confidence: 99%

Section: Modifying Interface Shape In Melt Growth Via a Traveling Magmentioning

confidence: 99%

Section: Modifying Interface Shape In Melt Growth Via a Traveling Magmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Fluid dynamics in crystal growth: The good, the bad, and the ugly

Derby

2016

Progress in Crystal Growth and Characterization of Materials

View full text Add to dashboard Cite

show abstract

Semiconductor Crystal Growth under the Influence of Magnetic Fields

Frank‐Rotsch

Dropka

Kiessling

et al. 2019

Crystal Research and Technology

View full text Add to dashboard Cite

The recent development of semiconductor crystal growth focusses on increase of process efficiency and simultaneous improvement of crystal quality. For improved crystal quality, an exact and permanent control of the melt flow is a crucial parameter. To achieve larger crystals, the melt volume must be increased markedly resulting in disadvantageously changed melt convection. In the case of Czochralski growth, the flow can even become turbulent. This changed flow can disturb the single crystal growth and may give rise to dopant inhomogeneities within the crystal. To effectively influence melt flow and hence to improve growth conditions, magnetic fields can be applied. Mostly, steady magnetic fields (SMF) are applied in industrial scale to damp melt flow oscillations. However, compared to SMF the application of non-SMF proves to be also very promising since significantly lower induction causes similar effects in the melt. An overview on magnetic field features with the focus on achievable results under the influence of traveling magnetic fields is given.

show abstract

Data‐Driven Cz–Si Scale‐Up under Conditions of Partial Similarity

Dropka,

Böttcher,

Chappa

et al. 2024

Cryst. Res. Technol.

View full text Add to dashboard Cite

In Cz–Si growth, the shape of the solid–liquid interface and the v/G ratio significantly impact crystal quality. This study utilizes a data‐driven approach, employing multilayer perceptron (MLP) neural networks and Bayesian optimization, to investigate the scale‐up process of Cz–Si under conditions of partial similarity. The focus is on exploring the influence of various process and furnace geometry parameters, as well as radiation shield material properties, on the critical measures of crystal quality. Axisymmetric CFD modeling produces 340 sets of 18D raw data, from which 14‐dimensionless derived data tuples are generated for the design and training of the MLP. The best MLP obtained demonstrates the ability to accurately assess the complex nonlinear dependencies among dimensionless numbers derived from CFD data and, on the output side, interface deflection and v/G. These relationships, crucial for scale‐up, are successfully generalized across a wide range of parameters.

show abstract

Flow Control by Magnetic Fields during Crystal Growth from Melt

Cited by 9 publications

References 170 publications

Fluid dynamics in crystal growth: The good, the bad, and the ugly

Fluid dynamics in crystal growth: The good, the bad, and the ugly

Semiconductor Crystal Growth under the Influence of Magnetic Fields

Data‐Driven Cz–Si Scale‐Up under Conditions of Partial Similarity

Contact Info

Product

Resources

About