The X-ray double-crystal technique was applied for an integrated analysis of substructures in plastically deformed beryllium single crystals, using both radial intensity distributions 1(20) and rocking curves l(w) of the reflections 0002, 1010 and 1120. Scanning of the surroundings of selected points of the reciprocal lattice (reciprocal space mapping) in two dimensions gives comprehensive information about the lattice disorder due to the dislocation structure. From the line broadening of the intensity distributions 1(2 0), which is caused by the local lattice strains of the irradiated specimen, mean total dislocation densities ~) can be estimated via Fourier analysis of the peak shape. The line broadening of the rocking curves I(w) is mainly related to the local lattice disorientations and allows, therefore, the estimation of the excess density AQ of edge dislocations of same sign introduced by the plastic bending of the crystals. Using the kinematical approach of Krivoglaz for dislocation-induced diffraction line broadening, total dislocation densities ~ 1013 m 2 were obtained from the radial intensity distributions. The evaluation of the rocking curves led to excess dislocation densities in the range AQ ~ 10 TM m 2. These values are in good agreement with a calculation of the density of geometrically necessary dislocations for the plastic bending.PACS 61.72 -Defects and impurities in crystals; microstructure. PACS 81.40 -Treatment of materials and its effects on microstructure and properties. PACS 01.30.Cc -Conference proceedings.